p41-47 EAS IC Awards 2008 sub system and outsourcing 1/7/08 16:40 Page 43
IC INDUSTRY AWARDS PREVIEW 43
process which requires tighter controls is
the chemical area. If the chemical is
outside of the mix ratio, the wafer can be
improperly processed and, as a result,
scrapped. If chemicals are not ready to go
when needed, process down time can cost
up to $1M per minute. Engineers and fab
managers are requiring that chemical
preparation steps must include chemical FractalFill Blending Products are
management systems with interactive environmentally friendly products. They
levels of control to ensure that the greatly reduce chemical consumption and
chemical mix is 100% accurate the first waste, and thus far there has been zero
time, and that the mix is always ready for chemical waste in all products in
the manufacturing process. production. The controller blends the
FractalFill characteristics combine to chemicals using an algorithm that
form a proven industry first technology measures the chemical concentration
which provides copious advantages to the compared to the tank level.
customer: The tank will contain homogeneous
● increased wafer throughput/yield - solution before the tank is full. Any
no wait time for chemical delivery chemical that goes unused at the process
● minimised ambiguity in chemistry line is recirculated and blended back to
applications target concentration. The reporting tools
● increased productivity also provide the tool owner data on the
● quick return on investment (6 weeks quantity of chemical used in previous
● tool to tool variability minimised ● "Point of Use" chemical management recipes. This allows chemical inventory
● reduces chemical consumption and● feed forward/feed back control of logistics to become more fine tuned and
the chemical management process waste and extends bath life accurate.
● remote operation capabilities
● modular design
Four standard models are available to
meet the needs of specific facilities:
● TAKLDM Single chemical mix,
single tool
● TAKLDM+ Single chemical mix,
multiple tools
● TAK M2, 3, & 4 Multiple chemical
mixes, single tool
● TAK M2, 3, & 4+ Multiple
chemical mixes, multiple tools
The significance with the FractalFill
controller is that the wet bench is always
in a chemistry ready and supplied mode,
with an analytically confirmed blend.
The control electronics provide extreme
mean time before failure, and the layout
provides "at a glance" troubleshooting
with visual indicators for all inputs and
outputs. The technician can control, The IC Industry
change and alter the machine's operations
remotely.
Awards 2008
The open architecture of FractalFill
products can be stacked into a tower for
will be
the smallest footprint, or used as a
modular package capable of being
integrated into a wafer manufacturing
presented at
tool. Multiple ports are available for tool
interface and factory host automation SEMICON Europa
allowing it to be connected into any
system. FractalFill Blending Products
in Stuttgart on
were introduced to the market and
qualified to process in 2007 at three
unique install locations.
7th October
One of the crucial elements in this
July 2008
www.euroasiasemiconductor.com
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