p41-47 EAS IC Awards 2008 sub system and outsourcing 1/7/08 16:40 Page 41
IC INDUSTRY AWARDS PREVIEW 41
SUB SYSTEM/COMPONENT PROVIDER
NEW SYSTEM AWARD
SUBSYSTEM/COMPONENT PROVIDER
The tools required for semiconductor manufacturing are actualised as a result of many companies providing
innovative subsystems and components to the tool manufacturers. These subsystems and components can be a
critical enabler for the success of a given tool.
NEW SYSTEM/COMPONENT AWARD
This Award recognises excellence in providing tool manufacturers with the elements they need to develop tools
with the exacting requirements of device manufacturers. This may be a delivery system, power supply or any
element of a tool that is developed and manufactured by another company than the tool manufacturer.
IMPROVEMENT AWARD
Not all improvements are from new developments and this Award recognises the continuing development
companies make to the products and processes they provide.
HACH ULTRA
digital communication standard protocols sample stage motorised in the XYZ axis
www.hachultra.com such as RS 485, Ethernet, USB or for automatic loading and alignment of
Profibus DP in addition to traditional the sample. XY horizontal translation
ORBISPEHERE 510
analog outputs. The ORBISPERE 510 allows mapping of thin film uniformity
provides efficient 3 in 1 process over the sample area. Each point on the
Hach Ultra’s ORBISPHERE 510
monitoring, process efficiency and wafer map is measured in less than 1
instrument has the capability of
minimised total cost of operation, second, with full spectral information
according to the company. available over the 440 - 850nm range.
connecting TC sensors for process control
The Auto SE features real time
monitoring. The instrument offers multi-
visualisation of the measurement site and
channel capability for both thermal
automated selection of 8 spot sizes. This
conductivity sensors measuring H2 or N2
is very useful for cases where the sample
and for electrochemical sensors
HORIBA JOBIN YVON SAS
is patterned or has poor surface quality.
measuring O2. This complete system is
www.jobinyvon.com/ellipsometry In these cases the user may view exactly
designed for process monitoring in liquid
where the sample spot is located using the
or gas phases across a wide range of Simple Thin Film Measurement with the
Vision System, and choose the optimum
applications for the electronics industry. Auto SE
spot size accordingly.The patented
Improved accuracy coupled with fast
MyAutoView Vision System is mounted
response time is a key process control The Auto SE is an innovative new thin
within the standard ellipsometer optics.
This unique design provides two main
attribute for advanced semiconductor film measurement tool for determining
advantages:
processing. Up to 3 sensors using the thicknesses and optical constants (n,k)
● Visualisation of the measurement
electrochemical or thermal conductivity of thin layers and multi layers. The
site for all kinds of samples.
technologies reduces cost of installation instrument has been introduced by
● Selection and measurement of only
and ownership, according to the company. HORIBA Jobin Yvon to simplify thin film
the front reflection for transparent
A high level of accuracy, rapid response analysis whilst maintaining the major substrates
time and selective gas measurements are advantages of ellipsometry such as non
The Auto SE also offers a large choice
claimed to give reliable and effective destructive analysis, accurate thickness
of accessories (such as temperature
process monitoring. Software is accessible measurement with angström resolution,
controlled cell, liquid cell, 360° rotation
through a full colour touch screen and multi layer measurement capability.
control, autosampler, plastic film mount,
allowing easy configuration of the The Auto SE covers the diversity of thin
etc...) to accommodate a wide range of
experiments and sample shapes.
instrument for process parameters and film applications, in the fields of thin film
The Auto SE is controlled by
alarms. The main window displays real photovoltaics, micro electronics, flat
theAutoSoft software integrated into the
time process readings, graphed sensor panel displays, functional and optical
common software platform that controls
trends, alarm limits, temperature and coatings and biotechnology.
all HORIBA Jobin Yvon ellipsometers.
event occurrence.
The Auto SE is an integrated compact AutoSoft integrates very intuitive
This complete system is designed for system that guarantees efficiency and interfaces allowing full automatic analysis
process monitoring in liquid or gas phases productivity for routine analysis of thin of thin film samples with a simple push
across a wide range of applications. To films. Its design combines automation button operation.
assist with process investigations, data with experimental modularity. The Sample analysis takes only a few
can be easily transferred using one of the instrument includes a 200x200 mm seconds and provides a complete report of
July 2008
www.euroasiasemiconductor.com
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