p40 EAS IC Awards 2008 mns 2/7/08 11:59 Page 40
40 IC INDUSTRY AWARDS PREVIEW
MICRONANOSYSTEMS INNOVATION AWARD
MicroNanoSystems Innovation Award
MicroNanoSystems have been with us for some time but only recently have they progressed enough that their
future potential can be realised. These tiny machines are set to revolutionise our lives and the innovations
developed now will decide the future direction of these devices. This Award is designed to highlight the
imagination and innovation that is occurring in the field.
ALCATEL MICRO and then discarded), which limits frequencies. SiTime has revolutionised the
MACHINING SYSTEMS
contamination risk and increases master miniaturisation of clock oscillators.
www.alcatelmicromachining.com
life-time. The second, STU, SiTime’s MEMS-based clock oscillator
simultaneously combines UV and thermal (SiT8002XT) is available in tiny
AMS 3200/AMS 4200 cluster tools
NIL, allowing the complete imprint footprints, significantly smaller than any
sequence to be performed at a constant quartz-based clock oscillator, but even
temperature. The Sindre system is able to more importantly, in a package that is
The Alcatel AMS 3200/AMS 4200 imprint 30 wafers/hr on up to 8-in. dia. only 0.27mm thick.
cluster tools provide recent process Substrates. Such an extra-thin package, which is a
capabilities in DRIE for etching silicon three-fold improvement over the best
materials and glass-like materials, as well quartz-oscillator packages, can enable a
as PECVD solutions for SiO2 and Si3N4 new generation of miniaturisation and
isolation layers. Wafer handling modules improved aesthetics for a variety of
are based on BROOKS field-proven applications, such as extremely thin
stations. Process modules are equipped digital cameras and mobile phones.
with a high density, low-pressure ICP The SiT8002XT can also be used in
plasma source for Bosch DRIE silicon
SITIME
next-generation Smart Cards and SIM
etching and etching of deep SiO2, quartz,
wwwsitime.com cards, potentially accelerating the
fused silica, borosilicate, and blass, and convergence of electronic wallets and cell
PECVD deposition of SiO2 and Si3N4 at
World's Thinnest Programmable
phones and opening up new revenue
room temperature. These cluster tools are
Clock Oscillator
streams for mobile carriers.
dedicated to volume production of MEMS SiTime’s SiT8002XT also offers other
and 3D semiconductors. Digitisation, miniatusisation and improved benefits – the devices can support any
aesthetics are worldwide trends in custom frequency between 1 MHz and
OBDUCAT
electronics, as evidenced by the massive 125 MHz with deliveries in a matter
www.obducat.com commercial success of ultra-thin mobile of days rather than weeks or months,
phones (Motorola’s RAZR, Samsung’s which is of massive value to digital
Sindre Manufacturing system for NIL Ultra II family) ultra-compact MP3 designers and supply chain specialists
players such as the iPOD, and worldwide. Mechanical robustness is
Sindre, a high volume manufacturing increasingly smaller, thinner digital inherent in all SiTime products – they
system for nano-imprint lithography cameras from Japanese leaders such as can withstand shock up to 30,000 Gs, as
(NIL), offers a manufacturing level Sony, Canon and Nikon. The worldwide well as vibration resistance up to 40 Gs,
solution to procedures of consumer trend is towards thin and light electronics providing outstanding performance for
products and optical storage media like equipment, because it is smaller, demanding automotive and consumer
HD-DVD and Blu-ray. Two key convenient, and fashionable. electronics applications.
technologies have been developed into the An electrical clock signal is the Finally, the devices are
system. The first, IPS, is the inversion of heartbeat of any digital electronics environmentally friendly – they are
a hard master into and intermediate system. Traditional clock sources, such as available in RoHS compliant lead-free
polymer stamp (used once for imprinting quartz-based oscillators, have been the packaging.
clock sources in electronics for decades. All in all, SiTime’s SiT8002XT
However, crystal-based clock oscillators programmable oscillator provides inherent
are rarely thinner than 0.8mm due to benefits of being the world’s thinnest
constraints in their physical properties – clock source (by a factor of three) with
the material is brittle and is subject to the outstanding shock and vibration
cracking, warping, and electrical resistance.
instability. Quartz-based clock oscillators These devices will usher in a new era
are frequently the key components that of environmentally-friendly, thin, light,
prevent thinner electronics equipment. In fashionable equipment and potentially
addition, they generally have large develop new business models for
footprints and have long lead times for mobile carriers and electronics
availability, especially for custom manufacturers.
www.euroasiasemiconductor.com July 2008
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