p41-47 EAS IC Awards 2008 sub system and outsourcing 1/7/08 16:40 Page 42
42 IC INDUSTRY AWARDS PREVIEW
of test programs (scripts) ranging from
the simple to complex, including sourcing,
measuring, test sequence flow control,
and decisions with conditional program
branching. Because it can be easily
KEITHLEY INSTRUMENTS, INC.
integrated with other instruments in
www.keithley.com
automated systems, it is very useful to
component manufacturers and
The Model 2636 Dual-Channel
semiconductor fabricators for wafer level
SourceMeter Instrument
testing and packaged device testing.
The Model 2636 Dual-Channel
SourceMeter Instrument combines a
TRES-ARK, INC.
precision power supply, true current
www.tresark.com
source, DMM, arbitrary waveform
generator, V or I pulse generator with
AutoLytics, an automated CMP
film thicknesses, optical constants, measurement, electronic load, and trigger
monitoring system
surface roughness, and film controller all in one instrument. It
inhomogeneities. As the software is multi represents a new, unique way of doing The FractalFill product line was designed
language it is simple to operate for parametric analysis at resolutions as fine in response to customer requests for a
everyone.The software was created to fit as 1fA (10-15 A), which is often required chemical management system that would
the needs of three types of users: for many semiconductor, optoelectronic, provide precisely blended chemical mixes,
● OPERATOR using a simple interface and nanotechnology devices. An in an always ready state, with interactive
for routine thin film control instrument-based, multi channel control features. The technology
● ENGINEER with a large variety of architecture results in a 50 percent lower incorporates three core areas of expertise:
analysis functions to optimize results cost and test speeds up to four times ● Analysis - detects and precisely
and/or experimental recipes faster than typical mainframe-based measures the chemical mix
● SERVICE with an interface for source-measure solutions. With Test ● Control - ensures accurate chemical
detection and diagnosis of possible Script Processor (TSP) and TSP-Link composition
problems of the system; thanks to built in intercommunications bus, the Model 2636 ● Delivery - ready precision blends
diagnosic indicators including in Auto SE. lets engineers create fast test systems that
are ideal for research, characterisation, Patented FractalFill blending products
The Auto SE is a new generation of thin wafer sort, reliability, production have the following notable features sets:
film measurement tool that combines ease monitoring, and a multitude of other test ● concentration and volume control
of use with the accuracy of spectroscopic applications. with analytical and control hardware
ellipsometry. The Auto SE is a turnkey The Model 2636 provides cost ● chemical mix is in an always ready
system that is ideal for the quality control effective DC and pulse testing from and supplied mode
laboratory and for industrial lines that femtoamps and microvolts up to ● real-time control and dispense of
need routine thin film measurement. 200V/1.5A. It also includes a PC-like dilute chemical mixes
●Unique Evolution of the current microprocessor to enable easy ● patented auto-replenish chemical
Spectroscopic Ellipsometers existing on programming and independent execution blending
the market
●The Auto SE provides a unique
confocal Vision System providing two
main advantages:
Exact positioning of the measurement
spot on a sample and selection and
measurement of only the front reflection
for transparent substrates
The Auto SE is a highly featured
instrument including: XYZ motorised
stage, integrated microspot optics,
automated selection of 8 spot sizes, and
the unique MyAutoView vision system.
The Auto SE is controlled by the
Integrated Auto Soft software platform,
providing:
● Ease of use with a new GUI
generation based on the use of icons and
internet like hyperlink navigation
● Multilanguage capabilities
● 3 user modes: operator, engineer,
service
The Auto SE includes built in
diagnostic indicators for the automatic
detection and diagnosis of problems.
www.euroasiasemiconductor.com July 2008
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