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MICRONANOSYSTEMS
when micro-milling or micro laser techniques are
useful, such as for early designs, R&D iterations
and cost-effective prototypes. As such it sees a
future where it may well develop joint production
relationships with such providers so as to ensure
end users get the best of both worlds.
Typical features can be as fine as one or two
microns, and in some cases sub-micron tolerances
can be achieved. Both single-thickness and
three-dimensional parts can be produced.
“As designers’ relationships with us develop,
they increasingly realise that we can make metal
micro-components with more exacting designs and
tighter tolerances than they ever realised were
achievable,” said David Worsdell, marketing
manager, Tecan. “As they begin to understand the
process, they also see the advantages of PEF as a
mass-production process.”
Diagrams 3 and 3a.
Process step 3: New parts for old
Expose the image One such example came in the form of an order
onto the photo-resist from a global medical equipment company.
using UV radiation Following a development period which moved
away from the company’s original component
design, that was prone to production and
repeatability problems, a completely new part was
jointly conceived. This can be described as an
open-topped oblong box, measuring just 2mm proven that localised high aspect ratio
across its longest length. Crucially, the multi-level electroforming is possible, producing combinations
process provides the base of the ultra-miniature of narrow holes, or lands, in deep substrates in
box with a mesh matrix of tiny holes. Not only close proximity. Refined advances in
does the new all-in-one part significantly exceed photo-processing and photo-resist composition lie
the original specification, it is cost-effective, at the heart of the new capability, says
consistently accurate and mass produced. It is the company.
quick and easy to assemble and offers optimum Designs can be enhanced to provide greater
production yields for the company that had mechanical strength in extremely tight-tolerance
problems with its previous solution. regions, or by minimising susceptibility to damage
A further example, developed for a world from vibration or shock, for example.
leading electronics company, is a 45micron thick Typical micro-applications include sensors,
gold-plated encoder disk featuring a series of actuators, hearing aids, medical devices, optical
round holes, each only 35micron in diameter with instruments, micro-lenses, one-piece, 100%
a tolerance of ±5micron, in this case first samples throughput, meshes/sieves, masks, displays and
were produced within one working week. micro-fluidic devices. Metal microstructures can
be manufactured to extremely small scale, with
High aspect ratios features, such as apertures, fluidic channels or
Three-dimensional parts where ‘holes’ and ‘lands’ raised lands, down to one or two microns possible
can be produced with up to 10:1 aspect ratios, in some cases, with tolerances at sub-micron
virtually impossible, says the company, using any levels. Typically they will also be employed in
other technology. micro electro-mechanical systems (MEMS) and
Micro-engineered metal parts produced in this micro optical electro-mechanical structures
Diagrams 4 and 4a. way offer extremely beneficial strength to size (MOEMS). Similarly, the company can produce
Process step 4: ratios, because very fine features can be produced larger parts, up to 300mm x 300mm, with equally
Develop the mandrel with significantly greater accuracy and mechanical fine resolutions.
to remove unwanted strength than ever before. The advances will be of
photoresist leaving particular interest to designers and users requiring Hybrid metal-polymer
pillars of photoresist detailed precision parts with critical tolerances, microstructures
which will become such as high-strength micro-meshes, screens and Hybrid microstructures can also be manufactured
apertures in the optical encoders. incorporating various material elements, including
finished part In laboratory conditions, the new system has metals and polymers.
www.micronanosystems.info July 2008
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