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FOGALE Nanotech
FOGALE
NANOTECH
delivers Metrology
Grenoble-Isere,
solutions for 3D
integration and TSV
France,
FOGALE nanotech, an
An Exceptional Ecosystem for
engineering company
created in 1983, is now a worldwide known reference in the
Innovative R&D and Production
field of high accuracy dimensional metrology.
With a high level of expertise in optical metrology and
a strong scientific background, FOGALE nanotech provides
AEPI is the economic development agency for Grenoble- standard and customized systems well suited to new
Isere/France. The Grenoble area, silicon valley in metrology requirements in the 3D integration process.
southeastern France, is Europe’s top center for research in Non-contact surface metrology is essential for device
micro- and nanotechnologies, and home of the Nano2012 characterization and process control. The use of Multi layer
program, representing over €2.3 billion ($3.2billion) substrates such as Silicon/Glue/Glass, the etching of high
investment at the Crolles STMicroelectronics site, including aspect ratio cavities such as TSV, and the development
more than €400 million ($557million) in funding from French of new systems in package devices require advanced
and local authorities.
3D dimensional metrology solutions
This program reinforces the area’s ecosystem and further The T-MAP delivers the perfect solution to control stacked
develops the cluster of derived technologies. Working substrates. Thickness and TTV of each individual layer and of
closely with Minatec, its anchor CEA-Leti, as well as the total stack, bow and warp, and surface roughness are
Minalogic, world-class competitive cluster for obtained in one pass, using a single tool.
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nanotechnologies and miniature intelligent solutions, AEPI T-MAP combines confocal chromatic and low coherence
provides complimentary information and services to IR sensors to give full flexibility to customers. If required,
www
companies exploring business opportunities. with the IR or white light microscopy capability, the
.eur measurement can be performed on product wafers with
oasiasemiconductor
ring6 Top grade research and training alignment of sensor beams on desired patterns.
European facilities for structural studies at the nano The “DeeProbe” is a low-cost solution for TSV depth
scale – ESRF (X ray), ILL (neutron), MINATEC measurement. Measuring optically several hundred microns
nano caracterization platform, depth is becoming possible without aspect ratio limitation.
ring6 An international dimension FOGALE nanotech 3D optical profilers deliver rapid, non-
450 foreign-owned companies contact 3D surface topography measurement with
ring6 A dynamic, diversified economy sub-nanometer resolution to measure bumps dimension
.com
The site of major operations of STMicroelectronics, and volume.
Schneider Electric, Applied Materials, Soitec,
square4
Issue IV 2009
Rossignol, Cap Gemini, Caterpillar, HP etc.
ring6 A young, urban and qualified population
ring6 An incredible quality of life Meet us at: SEMICON West: Booth 5865 NORTH
(GTI Technologies Inc.)
AEPI, your prime partner for assistance, free of charge, in US Distributors:
exploring business opportunities in the Grenoble-isere area. GTI Technology Inc. Fogale: FOGALE nanotech Inc.,
6 Armstrong Road, 1714 Lombard Street
Meet us at Semicon West 2009, North Hall 5882 SHELTON, CT 06484, USA SAN FRANCISCO, CA 94123
T: 203 925 6318 USA
F: 203 434 2590 T: 818 206 8525
AEPI E:
bob@gti-usa.com F: 818 518 1085
1 place Firmin Gautier
38027 GRENOBLE Cedex 1 FOGALE Headquarter
T: +33 (0)4 76 70 97 04 125, rue de l’Hostellerie
F: + 33 (0)4 76 70 97 19 Ville Active, BatA-Parc Acti+, 30900 NIMES France
E:
aepi@grenoble-isere.com T: +33 (0)4 66 62 05 55
W:
www.grenoble-isere.com F: +33 (0)4 66 62 71 60
W:
www.minalogic.com E:
g.fresquet@fogale.com
W:
www.fogale-semicon.com
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