IC Industry Awards Preview 2009
SPC - Statistical Process Control modules, vacuum and abatement analysis of the slurry concentration, and
SPC functionality: Pre-defined modules, and a variety of general utility quick data feedback, the AutoLytics will
mechanical events are measured and tool requirements are also available. The prevent scrapping of wafers due to
quantified. A data point is created family of modules is engineered to be slurry mixes being outside of critical
during each monitor to create a tool OEM specific. process parameters. Advanced software
database that is used along with was developed that allows capture and
statistical rules to flag abnormal analysis of primary data and the loading
mechanical events. It can also be used
Rohm and Haas Electronic
of new calibration MODELS without
to compare the performance of similar stopping the manufacturing process.
tools.
Materials
The AutoLytics has serial and TCP/IP
The VisionPad 5000
communication allowing alarms to be
connected through dry contact, fab
NEHP
The VisionPad was specifically designed automation, HSMS, and SECS/GEM.
Pre-designed Utility Modules
for defectivity reduction in shallow Interfacing with Tres-Ark’s control
trench isolation (STI) and interlayer software and a touch screen Graphic
NEHP’s family of modules claim to help dielectric (ILD) applications. The pad User Interface (GUI), the AutoLytics
tool installers dramatically decrease the targets volume manufacturing of provide a complete, real time look into
time, cost and complexity of a fab memory and logic chips at 65nm and the chemical concentration, temperature
installation. The new line features a full below. Rohm and Haas developed the and stability of your CMP process. A
range of pre-manufactured utility VisionPad 5000 with an optimised logging feature allows concentrations
modules that streamline site process polymer and pore structure to improve and recipes to be saved and analysed
piping tool installation. NEHP claims its the robustness of STI CMP processes. using provided calculation functions.
modules have been proven to reduce The VisionPad 5000 is claimed to
the time, cost, footprint and amount of achieve a 50 percent reduction in CMP- The AutoLytics Monitor is an automated
on-site labour required for installation induced scratch and chatter marks over sampling and monitoring system. The
while increasing safety. current materials. The pad is designed sampling frequency is a user defined
to produce improved results in overall parameter that can range from
NEHP modules replace complicated and planarization and when coupled with continuous sampling to sampling every
36
costly stick-built gas and water support ceria-based polishing slurries, the “x” seconds, minutes or hours. The
systems with pre-designed units that fit removal rate is also enhanced. single sample system pulls a small
www
conveniently into the fab room floor or stream from the CMP process every “x”
.eur sub-fab room, depending upon the The VisionPad 5000 features an amount of time, analysing percent solids
oasiasemiconductor
application. This modular method for advanced polymer specifically designed and the concentration of other analytes
200mm and 300mm tools was by CMP Technologies to lower specific to the type of slurry. The system
developed by NEHP for fast and easy defectivity on all types of commercial reports back the time stamped values in
integration into fabs pre-existing slurries. To achieve lower defectivity with real-time, as well as slurry flow, slurry
process while simplifying design, pre- good planarity, the VisionPad 5000 uses temperature, and error reporting. The
purchase, and installation. The use of 3D an energy absorbent polymer in a sample will go to drain, so there is no
.com
drawings streamlines the engineering unique formulation. It has demonstrated interruption to the CMP process.
approval procedures while 2D submittal performance factors that are equal to
assists architectural planning and the industry standard IC1000 pad –
square4
Issue IV 2009
layouts. The company claims that overall including removal rate, dishing, erosion,
modular systems reduce development process window and planarity - while
costs by 22 percent and on a per-tool reducing defectivity by at least 50
basis by 14 percent. percent. Other features include a long
pad lifetime and multiple grooving, sub-
NEHP modules are pre-designed and pad and adhesive configurations.
customised for specific tool types that
include tools designed and built by,
TresArk, Inc.
Applied Materials, ASML, Canon, DNS,
FSI, Hitachi, KLA-Tencor, Kokusai, Lam
AutoLytics Slurry Monitor
Research, Nikon Precision, Novellus, SEZ The AutoLytics Slurry Monitor is an
Group, Tokyo Electron and Varian automated sampling advanced chemical
Semiconductor Associates. monitoring system for the
The family of modules includes inert semiconductor industry. Using TreLytics
gas, process cooling water, de-ionized spectral analysis, the AutoLytics system Winner: Sub System /Component
water, and chemical process floor keep customers informed of exact slurry Provider New System Award 2008
modules for tool applications. Sub-fab concentration in real time. With HORIBA Jobin Yvon SAS
applications like complete utility rack automated sampling, accurate inline www.jobinyvon.com/ellipsometry
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