IC Industry Awards Preview 2009
Metrology /Test/ Yield Award
DESCRIPTION
Metrology in manufacturing occurs via a number of tools, software and
processes that rely on a strong understanding of manufacturing needs
with the goal of improving yield through early awareness of challenges.
YIELD DEVICE AWARD
This Award is for the tool or device that enables best in class
semiconductor inspection, measurement and test including metrology,
microscopy, spectroscopy, spectrometry, and CD measurement.
The measurement setup information and reduce their yield loss through improved
data can be automatically stored to process monitoring, and achieve faster
the B1505A\’s built-in hard disk drive yield ramps through accelerated process
and transferred to USB memory optimisation. For example, the
Agilent Technologies HSTD
sticks as well as other portable storage ChemetriQ 3000 detects NVDs non-
B1505A High Power Test
devices. It is also easy to destructively in four minutes compared
System
print graphical measurement data and to up to six hours with destructive
to copy and paste it into reports analytical methods, making it ideally
when the analysis results are suited for inline process monitoring.
26
The Agilent B1505A Power Device summarized.
Analyzer / Curve Tracer claims to be
www
The IC Industry Awards
the only single box solution available
will be presented at
.eur today with the capability to
Qcept Technologies
SEMICON Europa 2009
oasiasemiconductor
characterize high power devices from
the sub-picoamp level up to 3000
ChemetriQ 3000
volts and 20 amps. These capability The ChemetriQ 3000 is complementary
covers evaluation for new power The ChemetriQ 3000 provides rapid, to today’s existing optical inspection
device using wide band gap materials full-wafer, inline detection of non-visual technologies, filling the inspection gap
such as silicon carbide (SiC) or defects (NVDs). NVDs include both that exists today for a full-wafer,
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gallium nitride (GaN). organic and inorganic residues, metallic production solution that enables
contaminants, process-induced charging, detection of NVDs. As the missing link
The B1505A has separate modules that and watermarks. The ChemetriQ 3000 in moving the detection of NVDs to a
square4
Issue IV 2009
support high-current (HCSMU) and high- accomplishes this by employing a non- highly automated inline process, the
voltage (HVSMU). The B1505A also contact, non-destructive technology that ChemetriQ 3000 will allow chipmakers
supports a high-power SMU (up to 1 detects work function variations on the to broaden and expand their existing
A/200 V) and a multi-frequency surface of semiconductor wafers. These solution set to solve their NVD yield
capacitance measurement unit (up to 5 variations, which mark the presence of challenges.
MHz). Its ten-slot modular construction NVDs, are converted into image files
lets you configure the B1505A exactly using on-board software that can be In leading-edge semiconductor fabs,
the way you want. easily ported to a fab’s existing NVDs now account for as much as 30
analytical tools for enhanced defect percent of all defects. Since NVDs do
The B1505A software environment classification. not scatter light, they are undetectable
allows users to check device by optical inspection systems. According
characteristics and detect device faults The ChemetriQ 3000 is sensitive to 5E9 to the latest edition of the ITRS
with the easy convenience of a curve atoms/cm
2
, which exceeds the Roadmap, the rapid sourcing of non-
tracer. Just like on a curve tracer, the requirements outlined in the ITRS visual defects will become increasingly
B1505A supports rotary knob control of Roadmap for metallic contamination challenging—driving the need for
the independent sweep variable for detection down to the 22-nm node. affordable inspection techniques that go
intuitive and real-time evaluation of The company claim that with ChemetriQ beyond optical microscopy and offer
parameters such as breakdown voltage. 3000, semiconductor manufacturers can high resolution without sacrificing
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