IC Industry Awards Preview 2009
extended capabilities also promise also lowers the torque required to options such as RS485 Serial Modbus,
improved CoO by lengthening pump life operate the valve, making for easy Ethernet, Analog, Pulse and RS232, the
and helping to deliver lower utility manual operation and use of smaller MET ONE 6015 is easy to integrate with
costs.” actuators at a significantly reduced cost. any facility monitoring system and
With no gap between the disc and the enables future upgrading as the
According to Edwards, ALD processes seal, particles wash away, preventing communication needs of a facility
typically deposit less than 10% of the potential build-up that can obstruct change. These communication choices
pre curser on the wafer, thus increasing flow. and an array of mechanical installation
the potential for deposition in the options also reduce downtime related to
pump. To manage such challenging The Type 567 also features a specially instrument removal and re-installation
conditions, the iXH offers improved engineered body seal with a Q-shaped during routine calibration and
thermal control and increased torque. O-ring that eliminates the need for flat preventative maintenance work.
With its larger exhaust stages and the gaskets and is compatible with any
Gas Buster inlet purge, the iXH is also flange adaptor design, including those
The IC Industry Awards
designed to deal with extreme powder with serrated faces. The wetted inner
will be presented at
processes with TEOS flows above 5 body, plus the disc and bearings, are
SEMICON Europa 2009
Issue IV 2009
g/min. For manufacturing compound made of the same material as the
square4
semiconductors, such as those based on corresponding pipe material for
.com
gallium nitride, where large flows of improved fit and corrosion and chemical
hydrogen and ammonia are required, resistance. The Type 567 is one of the
InnerSense
the iXH pump mechanism has been few large-size butterfly valves on the
optimised to handle hydrogen and to market that offers 150 psi. The valve is
The SmartWafer
better withstand the corrosive effects of offered with a variety of modular
ammonia. components for optimum flexibility. SmartWafer runs through the equipment
Examples include manual valves with and records vibrations and acceleration
oasiasemiconductor
The iXH also features Active Utility hand lever- or gear-operated wheel, along its route. After completing the
.eur
Control (AUC), which includes an idle electric or pneumatic actuation, recording process, the data is
www
mode for periods when the pump is not positioner for throttle or flow control, downloaded via an external reading
in use. This can reduce utility costs by and EPDM or FPM seals, five types of station into a PC. The data is then
35
more than 10% compared to the limit switches, and fine adjustment synchronised with the equipment
previous generation of Edwards’s harsh option for additional flexibility of disc sequence of events and compared to
process pumps. An additional feature is angle control. Both manual and actuated the historic “good” fingerprint.
its modular design. versions include electronic feedback, Any abnormal signals indicate and
important for more sophisticated fluid pinpoint bad mechanical components or
handling systems. alignments which are causing particles,
GF Piping Systems
defects or scratches on the wafer
Type 567 Butterfly Valve
Hach Ultra
SmartWafer Analysis Software
The Type 567 Butterfly Valve from was
MET ONE 6000
Acceleration: Low frequency signals are
used to capture and report overall
introduced by GF Piping Systems in acceleration levels in the X and Y axis.
March 2008 with large diameter sizes up The MET ONE 6000 Series Remote Vibration: The high frequency capability
to 12 inches. The corrosion-resistant Airborne Particle Counter promises enables the SmartWafer to capture
valve incorporates a double eccentric accurate and reliable continuous particle detailed information caused by bearing
operating principle that provides monitoring. With a sensitivity range of wear, physical contact like rubbing which
improved wear and easier operation 0.2 to 5.0µm at 0.1 cfm flow rate and may shed particles or any undesirable
over traditional eccentric style butterfly 0.5 to 10µm at 1.0 cfm flow rate, the motion of the wafer or other nearby
valves. Typical applications include MET ONE 6000 has been designed to mechanisms. Vibrations are captured in
industrial water treatment and waste meet the specific needs of cleanroom all axes.
water systems. Central to the valve’s operations within the semiconductor,
double eccentric disk design is the off- hard disk drive and flat panel display Data Analysis: Advanced pattern
centre shaft that allows the disc to industries. The MET ONE 6000 offers recognition algorithms are used to
completely disengage from the disc diagnostic features that provide reduced analyze traces and allow two plots to be
seal, even when partially open. This troubleshooting and downtime-related overlaid for comparison and
reduces seal friction and improves seal costs. Built with ‘Long Life Laser’ superimposed with time events for easy
wear characteristics, resulting in longer technology, the Met One 6000 offers tracking. Data download: Typically less
service life, minimal maintenance and improved product quality, reliability and than 30secs. Software compatibility:
better protection against pressure performance for remote particle Microsoft Windows, 2000, XP and
surges. The double eccentric design counting. With communication Vista.
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