61
Pulsion: The next generation Ultra Low
Energy Implanter by IBS
VERY LOW ENERGY: 20 eV
HIGH THROUGHPUT: up to 160 wafers per hour
For 20 years, Ion Beam Services (ibs) has solution to Ion
been providing innovative leadership in the Implantation for
field of Ion Implantation. ibs has applications such as;
developed a range of products and services circle6 Very low energy
tailored to meet its customer expectations. for USJ for 32
22 nodes while
Features maintaining high
Based on our proprietary polarisation throughput,
technology with a unique pulsed plasma with controllable
configuration, Pulsion‚ achieves high depth down to 2 nm.
process stability at ultra low energy while
offering process versatility at both 200 & circle6 High productivity and low
300mm. Designed for volume CoO for S/D and polysilicon
manufacturing, the low acquisition cost doping (DRAM, FLASH).
makes Pulsion‚ the tool practical for R&D For more details about Pulsion‚ , contact
also. circle6 Excellent conformality for 3D in Europe :
pulsion@ion-beam-services.fr
doping for Fin FETS and trenches. in USA :
pulsion.usa@gmail.com
Applications
Pulsion‚ the next generation Plasma Ion The technology of Pulsion‚ is also available Semicon Europa 2008 -
Implanter, offers the industry a new for your solar applications. Booth 1448
EuroAsia semiconductor
guarantees to advertise your vacancy
until the position is filled
● EuroAsia guarantees unlimited space and time on
www.euroasiasemiconductor.com
● EuroAsia guarantees unlimited insertions on the weekly recruitment e-news broadcast
● EuroAsia guarantees to market to over 46,000 named microelectronic professionals
● EuroAsia guarantees the vacancy will have over 70,000 opportunities to be seen
● EuroAsia guarantees 1 print advertisement in monthly magazine
EuroAsia Semiconductor is the only title dedicated to the
European and Asian micro electronics industry.
Every month we deliver over 46,000 copies (print and digital)
to buyers and specifiers throughout Europe and Asia.
● Email:
jc@angelbcl.co.uk
● Tel: +44 (0)1923 690200
●
www.euroasiasemiconductor.com
Mid-September 2008
www.euroasiasemiconductor.com
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