www.euroasiasemiconductor.com NEW PRODUCT PROMOTION 25
Semiconductor sealing one-stop-shop
Semiconductor Aiming to maximize
manufacturing
semiconductor equipment
performance
processes are At Trelleborg Sealing Solutions, we know that
extremely
designers of semiconductor equipment want to
maximize the performance of the machines they
aggressive. Seals manufacture. Selecting the optimum seal
are often housed in
material and type can help ensure that. Using
the right seal increases service life and extends
areas of the meantime between planned maintenance
processing system
(MTBM). This will reduce downtime, maximize
production efficiency, yields and process
where they must reliability, meaning overall, total cost of
withstand highly
ownership is minimized for the customer. Wills Rings®
The original metal seals, Wills Rings®
destructive liquids, The experience and range to provide the optimum solution in static sealing
gases and plasmas,
offer the right seal for the job on connectors, flanges and plates for gases and
Trelleborg Sealing Solutions has lots of liquids under extreme conditions. They operate
at elevated experience in providing sealing solutions to in temperatures from cryogenic up to +850°C
temperatures or in
semiconductor equipment manufacturers. This and in pressures from hard vacuum and up to
allows us to recommend the best possible option 1000 MPa.
vacuum conditions. from our extensive range of innovative seal
To ensure long
materials and products. Many of these are Isolast® Fab Range™
specifically engineered to meet the increasingly High performance perfluoroelastomers specially
service life, demanding requirements of the semiconductor designed for semiconductor use, they are
equipment
industry, giving exceptional sealing integrity. virtually inert and have almost universal
We are a one-stop-shop for the majority of chemical compatibility. With a continuous
designers must sealing needs, even the most difficult within this operating temperature up to +320°C, they are
have available the
critical manufacturing process. ideal for upstream solutions such as wet
processing systems and in plasma.
right seals to stand Seals and materials
up to the job.
recommended for Elastomers
semiconductor applications: Fluoroelastomer (FKM) seals are ideal for
Trelleborg Sealing O-Rings downstream applications such as vacuum pumps
Solutions provides
Trelleborg Sealing Solutions offers a wide range and in wet processing where temperatures do
of O-Rings that balance cost-effectiveness with not exceed +220°C. They give excellent
one of the broadest performance. Any size of O-Ring is available resistance to many semiconductor chemicals,
ranges of products
(standard or custom), in materials ranging from while offering high purity, low permeation and
basic elastomer grades to leading edge compounds outgassing levels.
and materials specifically developed for the industry.
specifically
Engineered thermoplastics
Varilip® PDR A variety of sealing options are available in
engineered for this These seals consist of a PTFE based Turcon® engineered thermoplastics ranging from novel
sector.
sealing lip retained in a crimped or clamped solutions in PEEK™ to HiMod® wear rings and
metal case. They are ideal for use in process bearings.
pumps where they prevent gearbox oil from
entering the processing system and allow the The range of Trelleborg Sealing
introduction of an inert gas barrier. Solutions products for the
Semiconductor industry offers:
Variseal® ●Temperature resistance from cryogenic up to
Variseal® spring energized PTFE based +850°C
Turcon® seals have been used in the most ●Resistance to dry and wet process chemistry
demanding of semiconductor sealing ●Excellent stability – thermal, within a vacuum
applications including vacuum and corrosive or under pressure
environments. They are field proven to give high ●Extremely low levels of ionic impurities and
sealing integrity in extreme gas and liquid TOCs (Total Organic Carbon)
handling situations. ●Minimal particle generation and outgassing,
even at high temperatures
●Low permeation rates
●Reduced IR absorption and weight loss
●Good mechanical performance
●Low long-term compression set
Mid-September 2008 www.euroasiasemiconductor.com
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