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Grenoble-Isère, France:
Where the spring of innovation runs!
The Grenoble area, silicon valley in
southeastern France, is Europe’s top
center for research in micro- and
nanotechnologies and home to the recently
announced “Nano 2012” strategic
investment program, commonly called
“Crolles3”, with a 2.37 billion Euro 5
year Research program and heavy
investment in equipment as well. Decided
by STMicroelectronics, IBM, CEA/LETI circle6 Top grade research and training Applied Materials, Soitec, Cap Gemini,
and the local authorities, it aims to provide European facilities for structural Caterpillar, HP, Sun Microsystems etc.
competitive access to microelectronic studies at the nano scale – ESRF circle6 A young, urban and qualified
systems, and develop derivative (X ray), ILL (neutron), MINATEC population
technologies Prominent players are nano-caracterization platform, circle6 An incredible quality of life
MINATEC-CEA-Leti, as well as circle6 An international dimension 440
Minalogic, the world-class competitive foreign owned companies AEPI, your prime partner for assistance,
cluster for nanotechnologies and miniature circle6 A dynamic, diversified economy free of charge, in exploring business
intelligent solutions. Grenoble-area opportunities.
participants are also essential to clusters The site of major operations of
LyonBioPole (nanotechnology and STMicroelectronics, Schneider Electric, Semicon Europa 2008 - Booth 547
structural biology components) and
Tenerrdis (solar energy, hydrogen and fuel
cells, micro energy sources and smart AEPI
energy management). 1 place Firmin Gautier 38027 GRENOBLE Cedex 1 FRANCE
AEPI, Grenoble Isère economic Phone: +33(0) 4 76 70 97 04
development agency, provides Fax: + 33(0) 4 76 70 97 19
complimentary information and services to aepi@grenoble-isere.com
companies exploring business www.grenoble-isere.com
opportunities.
FOGALE Nanotech
Advanced metrology products and development of new MEMS (and NEMS) multi layer substrate and wafer
solutions for semiconductor, packaging devices requires advanced 3D dimensional on saw frame).
and MEMS metrology solutions. circle6 Membrane and Air gap thickness
FOGALE nanotech, an engineering measurement
company created in 1983, is now a Products: circle6 Deep RIE process control
worldwide known reference in the field of circle6 3D optical profilers circle6 Bulk and surface micromachining
high accuracy dimensional metrology. circle6 “MEMS in motion” analysis process control
With a high level of expertise in optical solution circle6 Integrated metrology for CMP, wet
metrology and a strong scientific circle6 Environmental chamber for etching, dry etching and back
background, FOGALE nanotech provides measurement under controlled grinding tools.
standard and customized systems well atmosphere
suited to new metrology circle6 Non contact optical substrate Semicon Europa: Booth 1448
requirements in the control: T-MAP series and T-POINT
semiconductor, solar, circle6 Metrology solution for Deep high
MEMS and “System in aspect ratio Via depth and
Package” fields. membrane thickness control: FOGALE Headquarter
Non-contact “DeeProbe” series 125, rue de l’Hostellerie
surface metrology is circle6 OEM sensors Ville Active
essential for device Bat A-Parc Acti+
characterization and Applications: 30900 NIMES France
process control. The use circle6 Complete 3D dimensional metrology Phone: +33 (0) 4 66 62 05 55
of Multi layer substrates, solution for MEMS analysis. Fax: +33 (0) 4 66 62 71 60
very thin wafers, high circle6 Bumps dimensional control. www.fogale.com
aspect ratio Via for 3D circle6 TTV, bow, warp and roughness g.fresquet@fogale.com
integration, and the measurements (very thin wafer,
Mid-September 2008 www.euroasiasemiconductor.com
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