The Templates for Blue
Thin-Film
and UV LEDs
Company
GaN, AlN, AlGaN, InN, InGaN
deposition �
etching � Chemical Vapour Deposition
annealing � Atomic Layer Deposition
cleaning � Plasma Etching
� Reactive Ion Etching
a73
� Rapid Thermal Processing
a73 mm
� Flash-RTP
a73 wafers
� UV-Ozone Cleaning
a73 y
a73 t
a73
Small and large area processing
aN) on
on glass, metal, synthetic mate-
rials and flexible substrates.
Contact us now! Technologies & Devices International
Tel: +1 301 572 7834 welcome@tdii.com
We make � In-line Systems
pioneer � Cluster Systems
engineering � Roll-to-Roll Systems
The Business of Science
®
for your � Stand-alone Applications
www.oxford-instruments.com/tdi3
taylor-made � Accessories
solution � Sputter Targets
opa, 7-9 October 2008
in Stuttgart at booth #1160
Meet us at SEMICON Eur
FHR Anlagenbau GmbH
Am Hügel 2, D-01458 Ottendorf-Okrilla
phone +49-35205-5200, fax +49-35205-52040
www.FHR.de postbox@fhr.de
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