Materials DuPont vFinal DR 18/12/08 12:18 Page 54
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MATERIALS
2. Testing Kalrez 9100 parts in the harshest
possible conditions;
3. Extending testing well beyond timeframes
for planned maintenance to establish a new,
far reaching standard for PM limits, all with
Spansion process engineering agreement.
Currently, Kalrez 9100 continues to exceed the
normal Spansion PM schedule by up to 6 times
longer, extending the 30 day PM out to 180 days,
depending upon the seal location. Increased
equipment availability has increased the fab
production capacity by greater than 20%, without
additional equipment.
Tremendous value was realised by running
longer without planned maintenance shutdowns to
replace critical seals, Sorum reports. Kalrez 9100
parts performance is responsible for up to 6x
improvement in availability. Spansion has now
Above: Kalrez 9100 the key to a possible solution with a combination expanded their adoption Kalrez 9100 to other
test results table of innovative filler and crosslinking technology. As tools in both thin films and dry etch with
evident from the extensive evaluation run by consistently favourable results.
Spansion (see table above), the resulting product ‘From concept to commercialisation, the
exhibited significantly less seal erosion, reduced collaborative effort between Roger Sorum at
particle generation and better elastic recovery Spansion and our team made the difference,’
characteristics. The life expectancy of the critical according to Steve Metaxas, global semiconductor
parts improved. marketing manager, DPE. ‘Roger’s feedback and
After reviewing specifications and test results, shared effort resulted in a solution that exceeded
product modifications were made and parts were all our mutual expectations.’
“O-rings should not produced for trials against other competitive
be the limiting factor FFKM products. Kalrez 9100 parts outperformed
for bringing a tool the competitive FFKM products under all
down for conditions attempted.
preventative The DPE and Spansion team, working together,
maintenance,” pushed Kalrez 9100 parts to extreme parameters
claims Roger Sorum, faster than anyone expected,’ said Kevin
equipment engineer DeMartini, market development manager and
at Spansion applications engineer - DPE. ‘The exchange of
information was refreshing and contributory to the
success of this process.
Understanding results
Key learnings from the collaboration between
Spansion, as the customer with the problem, and
DPE, as the materials science expert, were the
following:
1. Active feedback during development in real FIG 1: Cross sectional view of a MESC flange
time; seal showing erosion due to plasma attack
After reviewing specifications and test results, product modifications
were made and parts were produced for trials against other
competitive FFKM products. Kalrez 9100 parts outperformed the
competitive FFKM products under all conditions
www.euroasiasemiconductor.com December 2008 / January 2009
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