Materials DuPont vFinal DR 18/12/08 12:18 Page 53
MATERIALS
53
A technical
collaboration pays
dividends in high
performance
sealing. Here in
this article DPE
discusses a recent
collaboration with
Spansion.
From concept to
commercialisation
I
n the very competitive environment of cleaning chemistries (NF
3
and O
2
plasma-two
semiconductor chip manufacturing, stage) created an aggressive process environment.
reducing the ever expanding cost per wafer High particle count and leaks from seal erosion
is a top priority for all companies seeking any and compression set caused seal issues in IMD and
competive edge in this marginal industry. STI processes. The scheduled PM cycle was 90
Recently, DuPont Performance Elastomers (DPE) days, but premature sealing issues occurred within
successfully collaborated with Spansion Fab 25 in 30-60 days with the ISO poppet valve seal, slit
Austin, Texas to evaluate an O-ring product valve door seal and the MESC port flange insert
designed to help increase the uptime of HDPCVD seal. The incumbent O-ring performance issues
equipment. The dramatic results enabled Spansion were related to mechanical as well as chemical
to create a step change in their preventative attack with plasma erosion as can be seen in
maintenance (PM) schedule that increased figure 1 (next page) showing flange damage.
productivity and reduced the cost of ownership. Sorum stated that depending upon the seal
Spansion is the largest pure provider of Flash location, replacing O-rings can take up to 12
memory solutions in the world for the integrated hours to bring the machine back on line and pass
electronics market. The top 10 automotive wafer qualification. Some seal locations limit
electronics, consumer electronics and handset individual chamber production, while others limit
equipment manufacturers are users of Spansion the entire tool.
Flash memory products. ‘O-rings should not be the limiting factor for
For Roger Sorum, equipment engineer, bringing a tool down for preventative
Spansion Fab 25, uptime and quality are his prime maintenance,’ says Sorum. ‘The challenge is to
responsibilities to help maintain a competitive increase availability while reducing the total cost-
advantage. Sorum monitors developments in of-ownership.’
manufacturing materials and equipment in order Spansion turned to DuPont Performance
to improve equipment availability or to solve a Elastomers for material options to produce longer
tool problem. seal life with reduced particle generation. Within
A recent problem occurred in the HDPCVD several months, DPE developed a prototype and
equipment when process gases (SiH
4
, O
2
, He) and presented it to Sorum. Proprietary technology held
December 2008 / January 2009
www.euroasiasemiconductor.com
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68