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Oxfor
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Etch, Deposition and Gr
Etch, Deposition and Gr
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Plasma Etch & Deposition
Atomic Layer Deposition
Molecular Beam Epitaxy
Ion Beam Etch & Deposition
Nanoscale Growth Systems
Hydride Vapour Phase Epitaxy
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plasma.technology@oxinst.com
Oxford Instruments Plasma Technology Tel: +44 (0)1934 837000
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