Bionics Instrument
SSE Semiconductor Services Europe supplies and services tools and
equipment for the semiconductor industry and research facilities.
We represent the following companies in Europe:
CHA Industries
Supplier of deposition systems,
high vacuum evaporation systems,
sputtering systems and lift-off
evaporation systems.
Gas detection Systems
Having a considerable installed base
Modutek Corporation
worldwide, Bionics Instrument is the
manufacturer and supplier of
System Integration Specialist for
gas detection systems.
complete process stations. Supplier
of process rinsing modules, baths for
The company has over 30 years of
etching and positive resist developing,
experience with the development and
highly accurate constant temperature
production of electrochemical sensors
baths, recalculating baths and silicon
and complete system integrations.
nitride etch baths.
Investing in a gas detection system
of Bionics is investing in a reliable,
SSE Semiconductor Services Europe B.V.
long lasting safety instrument.
The Netherlands
Tel: +31 (0)72 576 25 70
Fax: +31 (0)72 572 18 18
Bionics Instrument Europe B.V.
E-mail: info@semiconductor-services.net Maxwellstraat 7, 1704 SG Heerhugowaard, The Netherlands
www.semiconductor-services.com
Tel. : +31-72-5765630 E-mail: info@bionics.net
Fax. : +31-72-5721818 Web: www.bionics.net
Dissatisfied with the throughput limitations of your current air-
bearing wafer processing platform? Aerotech's new Planar
HD
is
the answer. This high dynamic, high throughput air-bearing
provides 2 m/s scan velocities and 5 g acceleration with
450 mm wafer scalability. Each element of the Planar
HD
is
designed for maximum dynamic performance.
• 5 g acceleration and 2 m/s scan velocity provide a 4X
increase in throughput
• Dual encoder feedback on step axis minimizes turn-around time
• Integral water cooling allows higher rms acceleration and
improved geometric performance
• Advanced control features like Iterative Learning Control
dramatically improve dynamic performance
• Ultra-low latency Position Synchronized Output (PSO) triggers
external events based on real-time position data
Aerotech Ltd
Jupiter House, Calleva Park
Aldermaston
Berkshire RG7 8NN - UK
Tel: +44 (0)118 940 9400
Email: sales@aerotech.co.uk
www.aerotech.com
A e r o t e c h W o r l d w i d e
U n i te d St a te s • G e r m a ny • U n i t e d K i ng d o m • J a p an
AH1108A
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