Metrology
The size of
Material concerns
JEOL has announced a new transmission
devices
electron microscope, that they have called the
manufactured
JEM-ARM200F. The new tool incorporates a
in the IC
spherical aberration corrector for the electron
optic system as standard.
industry has
Transmission electron microscopes are
meant that
designed to study the geometry and structure of
substances at extremely high resolution. They
microscopic can also analyze the basic elements constituting
evaluation
substances and the status of the actual electrons
by incorporating various analysers such as
of the energy dispersive X-ray fluorescent spectrometer
manufacturing
(EDS) and electron beam energy loss
spectrometer (EELS).
process and
The new tool from JEOL has recently been
finished
introduced to correct spherical aberrations that The capacity of Veeco’s new catalyst allows for
have long restricted the resolving power of some truly extraordinary images
product has
electron microscopes. Spherical aberration
been a
correctors significantly enhance the resolution science applications, including cellular force and
requirement
and analytical capabilities, enabling ultimate mechanical studies and high resolution molecular
atomic level analysis. The JEM-ARM200F scale imaging.
of such
features atomic level resolution of 0.08 nm to The Catalyst utilises a top-down laser path
manufacturing
0.11 nm. It enables both atom-by-atom imaging that permits uncompromised use of phase
resolution and spatial resolution for atom-to- contrast, differential interference contrast and
22
since the atom chemical mapping of materials, including brightfield optical microscopy while offering
beginning.
energy-dispersive x-ray spectroscopy and optical and physical access from the top of the
www
electron energy-loss spectroscopy. AFM head. Compatibility with the top inverted
.eur As devices Despite not being specifically for IC optical microscope brands, as well as with their
oasiasemiconductor
have scaled
manufacturing, the new offering from Veeco standard condensers and a full turret of
Instruments will be a welcome contributor to objectives, promises customers nonlimited
down so too
nanotechnology and material classification. The optical capabilities.
has the need
BioScope Catalyst Life Science Atomic Force “We are excited to offer expanded
Microscope (AFM) is claimed to provide an analytical capabilities,” said Mark R. Munch,
for improved
unprecedented level of integration between Ph.D., Executive Vice President, Veeco
.com
microscopic
atomic force microscopy and light microscopy. Metrology. “With its seamless integration with
capabilities
The system claims features hardware inverted optical microscopes and software
and software innovations that enable the specifically designed for registering and
square4
Issue II 2009
two complementary techniques to be used overlaying optical and AFM data, the Catalyst
together more effectively and with greater represents a new level of functionality and AFM
ease-of-use for a wide variety of life accessibility for biological research. The
continued adoption of AFM by life scientists is
testimony to the great value that this technology
provides — not only through the ability to image
samples independent of fluorescent labels at
resolution higher than optical microscopy,
but also through the contribution
of new information in such areas as
cell elasticity, binding affinity, and
mechanical transduction.”
Let the microscope games begin!
The Carl Zeiss ORION Plus helium-ion-microscope
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