Metrology
manufacturing since the beginning. FEI’s new Quanta 50
As devices have scaled down so too has the series is capable of
need for improved microscopic capabilities. the most extreme
Devices in microelectronic manufacturing image resolution at
routinely have elements that are measured in the atomic level
atomic scales so it is not a push to suggest that
micro and nano electronic manufacturing has
been a main driver for the continual
advancement of microscopes and related
products. With microelectronic manufacturing
diversifying into nanotechnology, life sciences
and other related technologies there is a cross
over of the tools available.
Issue II 2009
The difference between early microscopes
square4
and the advanced devices of today are such that
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early microscope makers would assume you Quanta system. Specifically, beam deceleration
were joking if you suggested SEMs. TEMs and increases the surface imaging capability with
other modern devices had capacities down to lower landing energies and SmartSCAN
the Angstrom level but that is the requirements technologies further improve image quality by
of today’s industries and the microscope reducing noise.
manufacturers continue to deliver with more “The new Quanta 50 Series is one of the
advanced offerings. most versatile SEMs currently available,” said
oasiasemiconductor
Daniel Phifer, product marketing manager, FEI.
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New offerings “It is designed as a multipurpose SEM for labs
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The first new announcement was from Carl Zeiss that require high-performance imaging for a
SMT with the introduction of a powerful new broad range of samples, including those that are
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detector for the ORION Plus helium-ion- insulating, wet, dirty, or dynamically changing, in
microscope. Called the SPECTRA, the new industries such as materials research, mineralogy,
detector adds structural and compositional chemicals and petroleum, electronics,
analysis capabilities to the already sub- pharmaceuticals and biology. Unlike other SEMs,
nanometre resolution imaging offered by the where the sample has to fit the instrument
ORION Plus instrument. design, the Quanta 50 Series is designed to
According to Rainer Knippelmeyer, Senior enable viewing of any sample in its natural state.
Vice President of Carl Zeiss SMT Inc., “The The Quanta 50 Series delivers powerful
unique combination of ion scattering performance and flexibility, which enables it to
spectroscopy and sub-nanometre resolution remain a valuable investment as the needs of the
microscopy is an exciting development that lab change over time.”
opens the door to new, so far unexplored
applications in materials analysis and process
control. With this technique, we have been able
to demonstrate high energy RBS-like film
thickness measurements without the need for a
particle accelerator and at the nanometre scale.”
The centre-piece of the SPECTRA analysis
package is a solid-state detector optimised for
the detection of backscattered helium. This new
materials characterisation technique uses the
properties of backscattered helium, specifically
there energy and angle, to determine the mass
of the scattering nuclei within the sample.
Another new product offering is from the JEOL’s new
FEI Company with the release of the Quanta 50 transmission electron
Series scanning electron microscope (SEM). FEI microscope:
has adapted some technologies used in the The JEM-ARM200F
Magellan Extreme High Resolution SEM (XHR
SEM) to engineer improvements in the new
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