IC INDUSTRY AWARDS WINNER 2008
5
Award: Materials Improvement
Company: DuPont/EKC Technology
Process: Copper/low-k post-etch residue remover
Website: www.ekctech.com
Copper/low-k post-etch residue remover
T
he 21
st
century has ushered in a aqueous, low viscosity nature of the clean.
move to more sustainable, Furthermore, because of this and the broad
technologies and processes. But process window offered by EKC520 it can
the semiconductor industry still demands readily be integrated into production without
uncompromising performance throughout the costly tool retro fitting.
manufacture process. DuPont CuSolve
EKC520 copper post-etch residue remover EKC520 is safer and more sustainable in
offers a safer and more sustainable alternative customer processes, as it can be disposed to
for customers that does not compromise on drain after neutralisation under the applicable
cleaning and gives repeatable high up time, laws of most jurisdictions, unlike many solvent
high yielding, high throughput and fluoride cleaners.
manufacturable results.
CuSolve EKC520 is one component of DuPont
DuPont EKC Technology’s CuSolve EKC520 EKC Technology’s offerings for Cu integration
copper post-etch residue remover was cleaning solutions including post etch residue
introduced by DuPont EKC Technology, part of and post CMP cleaning. The CuSolve product
to address the key challenges facing its line builds on DuPont’s core competence in
customers as they continue to push the developing novel yet practical solutions for
boundaries of IC fabrication. Working in close today and tomorrows challenges.
collaboration with customers EKC identified
novel solutions to these challenges offering a EKC Technology is part of DuPont Electronic
step change improvement over previous Technologies, a leading supplier of electronic
generations of cleaning solutions. materials, including materials for the
fabrication and packaging of semiconductors,
EKC520 copper post-etch residue remover materials for hybrid, rigid and flexible circuits,
does not rely on “under etch and release” and materials for advanced displays.
mechanisms to remove post-etch residues. For more information, please visit
Instead, the optimised active components of the electronics.dupont.com.
chemistry selectively convert and remove these
residues. This selectivity is key to the success DuPont is a science company. Founded in
of EKC520 as it minimises CD loss without 1802, DuPont puts science to work by creating
having to trade off cleaning efficiency. sustainable solutions essential to a better, safer,
healthier life for people everywhere. Operating
EKC520 delivers unparalleled performance and in more than 70 countries, DuPont offers a
can do so with significant increases in wide range of innovative products and services
throughput by eliminating “spin off” steps and for markets including agriculture, nutrition,
reducing rinse times with a corresponding electronics, communications, safety and
beneficial impact on overall cost of ownership. protection, home and construction,
Such improvements are possible because of the transportation and apparel.
IC Industry Award Winners 2008 www.euroasiasemiconductor.com
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