12
IC INDUSTRY AWARDS WINNER 2008
Award: Sub System/Component Provider - New System
Company: HORIBA Jobin Yvon SAS
System: Simple Thin Film Measurement with the Auto SE
Website:
www.jobinyvon.com/ellipsometry
Simple Thin Film Measurement
with the Auto SE
T
he Auto SE is an new thin is patterned or has poor surface quality.
film measurement tool for In these cases the user may view exactly
determining the thicknesses where the sample spot is located using the
and optical constants (n,k) of thin layers Vision System, and choose the optimum
and multi layers. The instrument has been spot size accordingly.
introduced by HORIBA Jobin Yvon to
simplify thin film analysis whilst The patented MyAutoView Vision System
maintaining the advantages of is mounted within the standard
ellipsometry such as non-destructive ellipsometer optics. This unique design
analysis, accurate thickness measurement provides two main advantages:
with angström resolution, and multi-layer tool that combines ease-of-use with the
measurement capability. ● Visualization of the measurement site accuracy of spectroscopic ellipsometry.
for all kinds of sample The Auto SE is a turnkey system that is
The Auto SE covers the diversity of thin ● Selection and measurement of only the ideal for the quality control laboratory
film applications, in the fields of thin film front reflection for transparent substrates and for industrial lines that need routine
photovoltaics, micro-electronics, flat thin film measurement.
panel displays, functional and optical The image provided has a field of view of
coatings and biotechnology. It is an approximately 1mm” and a resolution of ● The Auto SE provides a confocal
integrated compact system that promises 10 µm. Vision System providing two main
efficiency and productivity for routine advantages:
analysis of thin films. Its design combines The Auto SE also offers a large choice of ● Exact positioning of the measurement
automation with experimental modularity. accessories (such as temperature spot on a sample
controlled cell, luiqd cell, 360° rotation ● Selection and measurement of only the
The instrument includes a 200x200 mm control, autosampler, plastic film mount, front reflection for transparent substrates
sample stage motorised in the XYZ axes etc...) to accommodate a wide range of ● The Auto SE is a highly featured
for automatic loading and alignment of experiments and sample shapes. instrument including: XYZ motorized
the sample. XY horizontal translation stage, integrated microspot optics,
allows mapping of thin film uniformity The Auto SE is controlled by the automated selection of 8 spot sizes, and
over the sample area. Each point on the AutoSoft software integrated into the the unique MyAutoView vision system.
wafer map is measured in less than 1 common software platform that controls ● The Auto SE is controlled by the
second, with full spectral information all HORIBA Jobin Yvon ellipsometers. Integrated Auto Soft software platform,
available over the range 440 - 850nm. AutoSoft integrates very intuitive providing:
interfaces allowing full automatic analysis ● Ease-of-use with a new GUI generation
The Auto SE features real-time of thin film samples with simple push based on the use of icons and internet like
visualization of the measurement site and button operation. hyperlink navigation
automated selection of 8 spot sizes. This ● Multilanguage capabilities
is very useful for cases where the sample Sample analysis takes only a few seconds ● 3 user modes: operator, engineer,
and provides a complete report of film service
thicknesses, optical constants, surface ● The Auto SE includes built-in
roughness, and film inhomogeneities. diagnostic indicators for the automatic
The Auto SE is a thin film measurement detection and diagnosis of problems.
www.euroasiasemiconductor.com IC Industry Award Winners 2008
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