The turbopump innovation.
The new dimension in vacuum technology!
Intelligent. Flexible. Efficient.
Four sizes offering pumping speeds of from
1,000 to 2,000 l/s
High pumping speeds for light gases (H
2
, He)
and heavy gases (Ar, CF
4
)
The utmost in process suitability, resistant to
particles
HiPace
™
Pfeiffer Vacuum · Headquarters/Germany
Phone: +49 (0) 6441 802-0 · Fax: +49 (0) 6441 802-202
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.net
Pendulum Control Valves
Series 65.0 / 65.1 for downstream pressure control
Efficient
High wafer throughput and yield
Semicon Europa
based on fast and accurate
Booth 166 HALL 1
response
Compact
Control and isolation valve
with integrated control unit
Simple
Easy to maintain
Series 65.1 with
extended control range
Swiss Headquarters VAT Benelux VAT France VAT Germany VAT U.K. VAT USA
Tel ++41 81 771 61 61 Tel ++31 30 6018251 Tel 01 69 20 69 11 Tel (089) 46 50 15 Tel 01926 452 753 Tel (781) 935 1446
CH@vatvalve.com NL@vatvalve.com FR@vatvalve.com DE@vatvalve.com UK@vatvalve.com US@vatvalve.com
VAT Japan VAT Korea VAT Taiwan VAT China VAT Singapore
Tel (045) 333 11 44 Tel 031 662 68 56 Tel 03 516 90 88 Tel 021 5854 4300 Tel 0065 6252 5121
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