IC Industry Awards Winners
Award Subsystems & Components Enhancement
System Torrento High-Flow Liquid Filters
Company Entegris
Torrento: high-flow liquid filters for
wet etch and clean process Issue VII 2009
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Torrento is a family of high-flow liquid filters that
help improve liquid contamination control of
nano-scale particles in wet etch and clean (WEC)
manufacturing processes used in advanced
oasiasemiconductor
semiconductor applications. Built on a
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combination of new membrane technology and
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an advanced ATE device construction, the
Torrento filters provide high-yield, rapid bath
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clean-up cycles, extended filter life, and allow for
fast change-outs and increase cleanliness.
With the Torrento high-flux platform of WEC
filters, semiconductor manufacturers can
maintain ultra-high flow rates without sacrificing
chemical purity at the 20nm rating. This is due to
the Torrento’s 20nm filters using a specialized
non-de-wetting Teflon membrane technology
that attracts the contaminating particles rather
than just sieving them. Torrento filters also have
a larger surface area than general use filters due
to an advanced ATE device construction
technology. The combined effect is a filter that
allows manufacturers to reduce particle-related
wafer defects, decrease process cycle time, and
realize 20 percent longer filter life than its technology nodes. Torrento filters are available
closest competitor. The low filter resistance also in cartridge and disposable formats to
is designed to reduce pump strokes and accommodate installation flexibility and
decrease wear and tear. upgrades. The disposable filter eliminates
The capability to maintain flow rate at an operator handling of the filter element, further
extremely small pore size in outgassing minimizing contamination risk. The disposable
chemistries such as SPM, SC1 and SC2 ensures design also reduces the potential operator
the stable processing conditions needed for the exposure to chemicals during installation and
high CpK results demanded at advanced disposal.
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