Dissatisfied with the throughput limitations of your current air-
bearing wafer processing platform? Aerotech's new Planar
HD
is
the answer. This high dynamic, high throughput air-bearing
provides 2 m/s scan velocities and 5 g acceleration with
450 mm wafer scalability. Each element of the Planar
HD
is
designed for maximum dynamic performance.
• 5 g acceleration and 2 m/s scan velocity provide a 4X
increase in throughput
• Dual encoder feedback on step axis minimizes turn-around time
• Integral water cooling allows higher rms acceleration and
improved geometric performance
• Advanced control features like Iterative Learning Control
dramatically improve dynamic performance
• Ultra-low latency Position Synchronized Output (PSO) triggers
external events based on real-time position data
Aerotech Ltd
Jupiter House, Calleva Park
Aldermaston
Berkshire RG7 8NN - UK
Tel: +44 (0)118 940 9400
Email:
sales@aerotech.co.uk
www.aerotech.com
A e r o t e c h W o r l d w i d e
U n i te d St a te s • G e r m a ny • U n i t e d K i ng d o m • J a p an
AH1108A
9001:2008
a73 Comprehensive line of solid and hollow shaft
rotary motion feedthroughs
a73 Does your powder-producing process cause
EXPENSIVE DOWNTIME?
a73 High speed, high torque devices for process
and R&D applications
a73 Protect your process environment from back-streaming
powder in the event of dry pump failure
a73 Low vapor pressure fluid seal ensures long
service life
a73 Fast pneumatic actuation – closes in <0.3 seconds
a73 Long cycle life under adverse process conditions
09-133
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