34
IC INDUSTRY AWARDS WINNER 2008
Award: Sub System/Component Provider - New System
Company: HORIBA Jobin Yvon SAS
System: Simple Thin Film Measurement with the Auto SE
Website:
www.jobinyvon.com/ellipsometry
Auto SE
T
The Auto SE is an where the sample spot is
innovative new thin film located using the Vision
measurement tool for System, and choose the
determining the thicknesses and optical optimum spot size
constants (n,k) of thin layers and multi accordingly.
layers. The instrument has been The patented MyAutoView
introduced by HORIBA Jobin Yvon to Vision System is mounted
simplify thin film analysis whilst within the standard
maintaining the major advantages of ellipsometer optics. This
ellipsometry such as non-destructive unique design provides two
analysis, accurate thickness measurement main advantages:
with angström resolution, and multi-layer circle6 Visualization of the
measurement capability. measurement site for all
The Auto SE covers the diversity of thin kinds of sample
film applications, in the fields of thin film circle6 Selection and
photovoltaic’s, micro-electronics, flat measurement of only the
panel displays, functional and optical front reflection for transparent substrates roughness, and film inhomogeneities.
coatings and biotechnology. As the software is Multilanguage it is
The image provided has a field of view of simple to operate for everyone.
The Auto SE is an integrated compact approximately 1mm
2
and a resolution of The software was created to fit the needs
system that guarantees efficiency and 10 µm. of three types of users:
productivity for routine analysis of thin circle6 OPERATOR using a simple interface
films. Its design combines automation The Auto SE also offers a large choice of for routine thin film control
with experimental modularity. accessories (such as temperature circle6 ENGINEER with a large variety of
The instrument includes a 200x200 mm controlled cell, liquid cell, 360° rotation analysis functions to optimize results
sample stage motorized in the XYZ axes control, autosampler, plastic film mount, and/or experimental recipes
for automatic loading and alignment of etc…) to accommodate a wide range of circle6 SERVICE with an interface for
the sample. XY horizontal translation experiments and sample shapes. detection and diagnosis of possible
allows mapping of thin film uniformity problems of the system; thanks to built-in
over the sample area. Each point on the The Auto SE is controlled by the Auto diagnostic indicators including in Auto
wafer map is measured in less than 1 Soft software integrated into the common SE.
second, with full spectral information software platform that controls all
available over the range 440 – 850nm. HORIBA Jobin Yvon ellipsometers. Auto The Auto SE is a new generation of thin
Soft integrates very intuitive interfaces film measurement tool that combines
The Auto SE features real-time allowing full automatic analysis of thin ease-of-use with the accuracy of
visualization of the measurement site and film samples with simple push button spectroscopic ellipsometry. The Auto SE
automated selection of 8 spot sizes. This operation. is a turnkey system that is ideal for the
is very useful for cases where the sample Sample analysis takes only a few seconds quality control laboratory and for
is patterned or has poor surface quality. and provides a complete report of film industrial lines that need routine thin film
In these cases the user may view exactly thicknesses, optical constants, surface measurement.
www.euroasiasemiconductor.com IC Industry Award Winners 2008
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