The
Thin-Film
Company
deposition • Physical Vapour Deposition
etching • Chemical Vapour Deposition
annealing • Atomic Layer Deposition
cleaning • Plasma Etching
• Reactive Ion Etching
• Rapid Thermal Processing
• Flash-RTP
• UV-Ozone Cleaning
Small and large area processing
on glass, metal, synthetic mate-
rials and flexible substrates.
We make • In-line Systems
pioneer • Cluster Systems
engineering • Roll-to-Roll Systems
for your • Stand-alone Applications
taylor-made • Accessories
solution • Sputter Targets
FHR Anlagenbau GmbH
Am Hügel 2, D-01458 Ottendorf-Okrilla
phone +49-35205-5200, fax +49-35205-52040
www.FHR.de postbox@fhr.de
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