Aerotech VAT 2/3/10 16:34 Page 30
Dissatisfied with the throughput limitations of your current air-
bearing wafer processing platform? Aerotech's new Planar
HD
is
the answer. This high dynamic, high throughput air-bearing
provides 2 m/s scan velocities and 5 g acceleration with
450 mm wafer scalability. Each element of the Planar
HD
is
designed for maximum dynamic performance.
• 5 g acceleration and 2 m/s scan velocity provide a 4X
increase in throughput
• Dual encoder feedback on step axis minimizes turn-around time
• Integral water cooling allows higher rms acceleration and
improved geometric performance
• Advanced control features like Iterative Learning Control
dramatically improve dynamic performance
• Ultra-low latency Position Synchronized Output (PSO) triggers
external events based on real-time position data
Aerotech Ltd
Jupiter House, Calleva Park
Aldermaston
Berkshire RG7 8NN - UK
Tel: +44 (0)118 940 9400
Email:
sales@aerotech.co.uk
www.aerotech.com
A e r o t e c h W o r l d w i d e
U n i te d St a te s • G e r m a ny • U n i t e d K i ng d o m • J a p an
AH1108A
Transfer Gates
Door Insert Valve
Outstanding choice
Sizes from SEMI standards
up to 150 x 1250 mm
Bellows sealed or
shaft sealed actuators
Options such as surface
coatings, heaters, different
sealing materials and more
Made to fit
your requirements
Swiss Headquarters VAT Benelux VAT France VAT Germany VAT U.K. VAT USA
Tel ++41 81 771 61 61 Tel ++31 30 6018251 Tel 01 69 20 69 11 Tel (089) 46 50 15 Tel 01926 452 753 Tel (781) 935 1446
CH@vatvalve.com NL@vatvalve.com FR@vatvalve.com DE@vatvalve.com UK@vatvalve.com US@vatvalve.com
VAT Japan VAT Korea VAT Taiwan VAT China VAT Singapore
Tel (045) 333 11 44 Tel 031 662 68 56 Tel 03 516 90 88 Tel 021 5854 4300 Tel 0065 6252 5121
JP@vatvalve.com KR@vatvalve.com TW@vatvalve.com CN@vatvalve.com SG@vatvalve.com www.vatvalve.com
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