Conventor Final Dr 1/3/10 14:47 Page 22
MEMS - Vendor View
process variations before
each mask tape out and fab run,
potentially reducing or eliminating design-
fabricate-test cycles.
In contrast to time consuming process
simulation, SEMulator3D’s voxel modeling
approach captures a complete MEMS die
processed through its entire fabrication
sequence, not just an isolated step or two.
MEMS and IC co-design
The fourth challenge, the fact that MEMS are
almost always tightly integrated with electronics,
imposes a further requirement on MEMS design
automation tools. Namely, the MEMS and
3D stress-strain specific features including design rule checks, accompanying IC must be designed and
analysis of a MEMS and makes it easy to go from 2D layout to a 3D optimized together. Therefore the MEMS tools
accelerometer solid model. The 3D solid model can serve as must be compatible with widely used IC design
electrostatic comb input for the comprehensive suite of field solvers and verification tools. To address this challenge,
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drive in in Analyzer, or it can be exported to third-party Coventor recently introduced MEMS+, a MEMS
CoventorWare field solvers. design platform that is fully compatible Cadence
www
Analyzer provides a suite of finite element Virtuoso which is the leading platform for
.eur solvers that handle the mechanical, electrical, analog/mixed-signal IC design and verification.
oasiasemiconductor
optical, fluidic and electromagnetic domains, as Rather than hand crafting over simplified
well as package analysis. In addition to behavioral models of MEMS as has been the
addressing MEMS-specific physics, and case until now, MEMS engineers can now enter
especially coupled electro-mechanics, all three their designs in a natural 3D environment and
sub-products are “process flexible”. That is, the automatically generate simulation models and
definition of the MEMS process, both the steps layout for their counterparts in IC design.
.com
and material properties, are shared by all and Automatic hand-off from MEMS engineers
readily modified by the users, thus addressing to IC engineers working in the Cadence
the challenge posed by process modifications environment not only reduces interface errors,
square4
Issue I 2010
made during the course of a specific design. but provides more accurate models that allow
greater optimization of MEMS+IC products.
Realistic designs Separately and in combination,
Recognizing that MEMS design usually proceeds CoventorWare, SEMulator3D and MEMS+
hand-in-hand with process development, address the challenges of MEMS design
Coventor introduced SEMulator3D for MEMS automation: process flexibility, 3D effects,
process engineering and process integration. complex multi-physics, and MEMS/IC co-design.
SEMulator3D uses patented voxel modeling These tools have enabled organizations in the
algorithms to emulate MEMS and semiconductor MEMS industry to be efficient by shortening
fabrication steps. Voxels can be regarded as 3D time to market and reducing development costs.
pixels. Both captive and independent MEMS With much of the industry growth expected
fabs use SEMulator3D to perform virtual to come from MEMS in consumer electronics,
fabrication of MEMS before running actual there is more pressure to deliver increasingly
silicon through their MEMS process. The tool capable MEMS in less time at lower cost. New
creates highly realistic, 3D virtual prototypes of entrants as well as established IDMs are turning
micro-fabricated devices. Examination of these to Coventor’s tools to meet these demands.
virtual prototypes can reveal design errors as
well as the impact of design changes and Coventor is a partner within the CEMMNT organisation
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