NPL vFinal 1/3/10 12:51 Page 27
Vendor View
MEMS Metrology
Micro-Electro-Mechanical Systems (MEMS) utilise microfabrication technologies to
access sensing and actuating capability at the micro- and nano-scale. The continual
drive for miniaturisation of microelectronics is revolutionising the sensors and
communications applications industries. However, most of MEMS prototyping work is
limited by the constraints of the standardised fabrication processes, limited
numerical and simulation tools and the immaturity of packaging technology for
MEMS applications.
Issue I 2010
square4
The National Physical Laboratory (NPL) helps overcome challenges through a suite of .com
characterisation tools designed to map the functionality of the end device, from high
resolution SEM imaging and topography measurements, to the determination of the
dynamic behaviour via laser vibrometry and interferometric techniques.
oasiasemiconductor
.eur
Measurement services High resolution SEM imaging and
offered:
www
chemical microanalysis
ring6 SEM systems with electron
27
Laser doppler vibrometry backscattered diffraction (EBSD) and
ring6 Polytec scanning differential vibrometer energy dispersive x-ray analysis (EDX)
system used for the characterisation of capabilities
static and dynamic properties of MEMS
devices with lateral feature dimensions ring6 Dimensional measurement accuracy in
of less than 10 µm, and out of plane the XY plane of 0.5 % at magnifications
resolution better than 1 nm below 50 000x
ring6 Custom built environmental chamber Prototype MEMS particle detector Consultancy
enables measurements in a range of ring6 Experience in MEMS concept design,
vacuum conditions down to ~5 mbar, Dual beam interferometry device parameterisation and
for investigating air damping and ring6 Dual beam interferometry for the simulations using CAD packages such
friction effects measurement of dynamic as Coventorware and SolidWorks
displacements ring6 Finite element analysis capability with
ring6 Piezo controlled, vacuum compatible ANSYS
x-y stage for generating the motion ring6 Modified plane mirror laser
profiles of larger samples (up to 25 mm) interferometer, with single and
National Physical Laboratory
differential set-ups, used to measure
Hampton Road, Teddington,
Surface topography and geometry the AC displacement of MEMS. The
Middlesex UK, TW11 0LW
measurements He-Ne laser beam can be focussed to
NPL helpline: 020 8943 6880
ring6 A range of instruments to measure a spot size of 6 µm, and the system
NPL helpline fax: 020 8614 0446
areal surface topography including has an in situ sample translation E-mail: enquiry@npl.co.uk
stylus profilometry, atomic force mechanism for measurements over a
Website: www.npl.co.uk
microscopy, coherence scanning range of ~1 mm. A servo mechanism
Further information
interferometry, confocal microscopy is used to lock into the most sensitive
Tel: 020 8943 8681
e-mail:
and focus variation microscopy part of the interferogram, resulting in
materials_enquiries@npl.co.uk
displacement resolutions down to 10 fm.
NPL is a partner within
ring6 Micro co-ordinate measuring machine
for measuring truly three-dimensional ring6 Sample translation mechanism for
structures measurements over a range of ~1 mm.
Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36