Aerotech Final DR 2/3/10 12:45 Page 14
Vendor Application
The combination of Aerotech’s BLM series brushless linear
servomotors and HLe series linear servo amplifiers provide
the smoothness and stability required for nanometre resolution
positioning whilst ensuring the required high bandwidth,
zero crossover distortion and ultra-quiet EMC characteristics
which are essential for this application
Aerotech against a laser interferometer with the block look ahead to minimise geometry errors in
error map information added to the controller. In tight profiles by regulating the speed and/or the
operation this ensures optimum translation stage position on each axis. The ORC use G-code
accuracy. programming for their particular application but
The combination of Aerotech’s BLM series the A3200 is also equipped for programming in
brushless linear servomotors and HLe series Aerotech’s own AeroBASIC or in C, C++, and
linear servo amplifiers provide the smoothness Visual Basic. For complete application
and stability required for nanometre resolution integration the optional Ncontrol SDK software
positioning whilst ensuring the required high development kit may be used with Windows
14
bandwidth, zero crossover distortion and ultra- based ActiveX components, C++, VB and .NET
quiet EMC characteristics which are essential for class libraries. There are also a number of
www
this application. advanced software and hardware features
.eur available to optimise throughput performance
Aerotech’s ABL9000
oasiasemiconductor
Full control
positioning system
and further improve overall machine operation.
with planar X-Y, ro-
Aerotech’s A3200 Digital Automation Platform The complete system was supplied to the
tary and lift stages
provides fully deterministic PC based motion ORC on a customised granite base with an
on granite base,
control with advanced diagnostics, set-up and additional fixed bridge arrangement that
with bridge struc- tuning features that ensure perfect results. As provides a stable platform for the ORC supplied
ture supporting UV
well as the PSO feature mentioned earlier, the interferometer optical system. The scope of
laser optical system
.com
A3200 includes trajectory generation with multi- supply also included direct drive rotary and
vertical lift stages with comparable resolution
and precision that are used together for pre-
square4
Issue I 2010
alignment of the substrate. Full cable
management was included in the design which
greatly assisted commissioning at the ORC.
The excellent performance of the ABL9000
series has now been enhanced with Aerotech’s
PlanarHD air bearing stage. The new stage is
aimed at high throughput scanning and ultra-
high precision step-and-settle applications found
in semiconductor processing and other
emerging MEMS/Nano technologies.
The design features larger air bearing
surfaces for improved load carrying and higher
dynamic characteristics. A brief performance
specification includes 2 m/sec scan velocity and
peak acceleration to 5 g - with a positioning
resolution of up to 0.25 nanometres,
repeatability to 50 nanometres and accuracy to
+/- 300 nanometres.
Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36