The
Thin-Film
Company
deposition ‹
etching ‹ Chemical Vapour Deposition
annealing ‹ Atomic Layer Deposition
cleaning ‹ Plasma Etching
‹ Reactive Ion Etching
‹ Rapid Thermal Processing
‹ Flash-RTP
‹ UV-Ozone Cleaning
Small and large area processing
on glass, metal, synthetic mate-
rials and flexible substrates.
We make ‹ In-line Systems
pioneer ‹ Cluster Systems
engineering ‹ Roll-to-Roll Systems
for your ‹ Stand-alone Applications
taylor-made ‹ Accessories
solution ‹ Sputter Targets
opa, 7-9 October 2008
in Stuttgart at booth #1160
Meet us at SEMICON Eur
FHR Anlagenbau GmbH
Am Hügel 2, D-01458 Ottendorf-Okrilla
phone +49-35205-5200, fax +49-35205-52040
www.FHR.de postbox@fhr.de
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