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Etch, Deposition and Growth
opa
Plasma Etch & Deposition
Atomic Layer Deposition
Molecular Beam Epitaxy
Ion Beam Etch & Deposition
Nanoscale Growth Systems
Hydride Vapour Phase Epitaxy
For more information email: plasma.technology@oxinst.com
Oxford Instruments Plasma Technology Tel: +44 (0)1934 837000
www.oxford-instruments.com/euroasia The Business of Science
®
The turbopump innovation.
The new dimension in vacuum technology!
Intelligent. Flexible. Efficient.
Four sizes offering pumping speeds of from
1,000 to 2,000 l/s
High pumping speeds for light gases (H
2
, He)
and heavy gases (Ar, CF
4
)
The utmost in process suitability, resistant to
particles
HiPace
™
Pfeiffer Vacuum · Headquarters/Germany
Phone: +49 (0) 6441 802-0 · Fax: +49 (0) 6441 802-202
info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.net
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