Series 61.2 for downstream pressure control
Integrated control unit
High reliability
even in contaminating processes
Easy maintenance
Service port for laptop connection
Various host interfaces
such as DeviceNet, RS232C .....
Outstanding control performance
Tel ++41 81 771 61 61
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Tel ++31 30 6018251
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Tel 031 662 68 56
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Tel 03 516 90 88
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Tel 021 5854 4300
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Oxford Instruments Etch, Deposition and Growth
For precise, controllable and repeatable etching, deposition and growth of micro and nano structures
Plasma Etch & Deposition Atomic Layer Deposition Ion Beam Etch & Deposition Nanoscale Growth Systems Hydride Vapour Phase Epitaxy
For more information email:
plasma.technology@oxinst.com
Oxford Instruments Plasma Technology
Tel: +44 (0)1934 837000
www.oxford-instruments.com/compsemi
The Business of Science®
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