Take a Closer Look at
Manufacturing
Kurt J. Lesker
www.lesker.com/Fabrications
10-025
Dissatisfied with the throughput limitations of your current air- bearing wafer processing platform? Aerotech's new PlanarHD
the answer. This high dynamic, high throughput air-bearing provides 2 m/s scan velocities and 5 g acceleration with 450 mm wafer scalability. Each element of the PlanarHD designed for maximum dynamic performance.
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• 5 g acceleration and 2 m/s scan velocity provide a 4X increase in throughput
• Dual encoder feedback on step axis minimizes turn-around time
• Integral water cooling allows higher rms acceleration and improved geometric performance
• Advanced control features like Iterative Learning Control dramatically improve dynamic performance
• Ultra-low latency Position Synchronized Output (PSO) triggers external events based on real-time position data
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Aerotech Ltd
Jupiter House, Calleva Park Aldermaston Berkshire RG7 8NN - UK Tel: +44 (0)118 940 9400 Email:
sales@aerotech.co.uk
www.aerotech.com
A e r o t e c h Wo r l d w i d e
Un i ted St a tes • Ger ma ny • Un i t ed K i ng d om • Ja p an
AH1108A
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