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SOLAR AWARDS
range with precise and reliable and no greenhouse gases are used for
measurement solutions that focus on the cleaning. The Solaris has the smallest
physical and electronic characteristics of footprint in the industry and has the
solar panels. SolarMeasure products highest utilization and process flexibility.
provide e.g.: monitoring of thickness, The Solaris is designed for easiest
resistivity and haze of the modules’ operation and maintenance - one person
TCO/MO layer; control of the scribing can do it all.
process; electrical insulation tests in order
to detect shorts between cells; or to
measure the PV module’s dimensions,
warpage or drill hole parameters.
SierraTherm Production
Dr. Schenk’s metrology solutions are Furnaces
supporting thin-film PV module 5500 Series APCVD System
manufacturers to optimize their
processes and gain higher yield The 5500 Series APCVD system with a
improve material quality and by this add 660mm deposition width is capable of
to a higher module performance save depositing a combination of up to five
production costs - a vital component of layers of doped (BSG, PSG) and
PV manufacturing especially in times of undoped SiO2 films in a single pass. Its
financial straits. throughput capacity of 1875 WPH for uniformity, and flexibility while
156mm wafers or 2300 WPH of 125mm minimising cost.
The basis of these benefits is the “total- wafers make it compatible with today’s ring6 Modular chemical vapour injector head
solution character” of Dr. Schenk’s high production cell lines. Films with assemblies allow quick and easy
31
metrology systems. Dr. Schenk offers thicknesses of up to 300nm can be installation and removal from the
inspection and measurement systems for deposited at this process speed. coating chamber
www
all involved process steps from one hand. ring6 Location and design of stainless steel
.solar
This enables customers to evaluate and The 5500 Series APCVD conveyor furnace bubbler systems maximize control and
correlate metrology data from indirect is well suited for continuous high volume serviceability
-pv-management.com
(optical) and direct (electrical) processing of substrates requiring single ring6 All injector head parts are durable
measurements along the line and as well as multi-layer thin films. precision machined structures
perceive an early feedback and a SierraTherm’s in-line system design ensuring accurate chemical delivery
comprehensive picture of the entire assures that each substrate receives the even after extended use
manufacturing process. same process treatment. ring6 Pump-based, bi-directional bulk refill
system provides continuous chemical
Only by this global evaluation potentials Distinctly unlike other furnaces, the refill without process interruption or
Issue III 2009
for process optimization become SierraTherm 5500 Series is claimed to be manual transfer
revealed. SolarInspect and SolarMeasure an energy efficient precision thermal ring6 Continuous self-cleaning mechanisms
solutions are widely recognised as processing system with the required high- in critical exhaust restrictions prevent
leading in the market of inspecting thin- performance. flow altering residue build-up
film PV module. More than 50 systems ring6 Automatic process exhaust and
installed world wide prove that Dr. precursor flow control guarantee
Schenk’s metrology solutions are consistent film results
integral part of today’s manufacturing ring6 Three tiers of graded, power saving
processes. insulation reduce energy bills
ring6 Stable, unsurpassed temperature
uniformity control ensures consistent
process results
OC Oerlikon Balzers Ltd.
Solaris thin film coating technology Process Applications:
for cSi cells ring6 Maintenance conscious design allows ring6 SiO
2
, undoped
chemical injectors and exhaust ducting ring6 Diffusion barrier or insulating layer for
Solaris is a revolutionary thin film coating to be cleaned while in place on the silicon wafers or soda-lime sheet glass
tool for crystalline solar cells. Front side system SiO
2
, boron or phosphorous doped
SiN and metal back side layers can be ring6 Multiple injector heads can be used in (BSG or PSG) TiO
2
:
deposited with the same tool platform. series within a single furnace, ring6 Antireflective layer for silicon solar
PVD sputtering is absolutely silane free maximizing process throughput, cells
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