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SOLAR AWARDS
Zero Width Laser Cutting Technology can from the stack in the water bath with
be used for precise glass separation at reduced breakage rates without an
production speeds not previously impact on high throughput.
possible and with edge characteristics not
attainable by any other process to date. The loaded carriers are lowered into a
The processed glass is four to five times water bath. A feeder system brings the
mechanically stronger and has defect free stack of wafers automatically to the The design of the ONYX-Revolution allows
edges without additional edge pickup point. A newly developed pickup for controllable uniformity. The cylindrical
processing, using this patented method system separates the foremost wafer from design is specified to achieve the same
aids the glass in withstanding extreme the stack without any mechanical stress results as competitive products. Some
day/night temperature changes in the which results in reduced breakage rates. customers are achieving results of +1.7%
harsh desert environments by maintaining After separation, the wafers are moved uniformity or even better.
the integrity of the glass, thus out of the water bath to the transfer
strengthening it and ensuring long term station along a special conveyer belt with The ONYX-Revolution provides 3 TIMES
stability says the company. a non-slip surface. target materials and 2 TIMES the
utilisation of linear or planar magnetrons.
Zero Width Laser Cutting Technology The belt creates a large surface contact Overall this is 5 TIMES the efficiency.
produces the maximum MicroCrack depth with the wafers which guarantees a gentle
in the subsurface layer of the glass and transport.
not thermal-fracturing of the glass. After
performing this application, the human With the technology used in the system,
BTU International
eye is unable to see any change in the wafer damage and breakage is reduced The MERIDIAN In-line Diffusion
properties of the glass; however, when to a minimum. High efficiency separating System
applying a small amount of pressure, the unit, combined with wafer control units
glass will split along the scribe line. and buffer systems, guarantee high BTU International’s MERIDIAN In-line
Following the split, the glass has no production and yield. Diffusion System features the MERIDIAN
particular damage and the highest edge phosphorus coater, which includes key
quality which a person can safely run their advances such as backside and topside
finger over requiring no further processing
Angstrom Science
coating and integrated wafer drying. The
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making grinding and cleaning lines system can be configured to achieve up
unnecessary. ONYX-Revolution Cylindrical to 1500 156-mm wafers per hour. The in-
www
Magnetron line process offers reduced wafer
.solar
handling and greater throughput than
Angstrom Sciences’ technology is found traditional batch processing.
-pv-management.com
in its magnetics. The cylindrical design
incorporates the company’s patented Reduced handling translates into lower
AMB Apparate +
profiled magnet technology in such a way breakage rates, improved yield and lower
Maschinenbau GmbH
that the profiles naturally conform to the cost of ownership. BTU’s Meridian
curvature of the cylindrical target. The Diffusion System increases cell efficiency
Wet Wafer 3000+ result for our customers is high utilization. through the use of backside doping and
precision temperature controls while also
Issue III 2009
AMB Apparate + Maschinenbau GmbH The magnetic field generated by this array providing high throughput and
Wet Wafer Separator 3000+, is a high- provides an angular sputtered flux. This significantly reduced breakage rates
throughput wafer handling system “tighter” profile results in more material through the use of in-line processing. The
designed for the thinnest 150 micron reaching the substrate. Meridian spray coater utilizes 3 methods
wafers in production through to 300 of control to adjust the dopant application
micron-thick wafers. The WWS 3000+ is More material arriving on the substrate thickness and uniformity. Uniform,
focused on water bath system integration means higher deposition rates and slower repeatable and controlled application of
requirements where emphasis is placed accumulation on the system shielding the dopant is required to insure consistent
on wafers being handled safely and and walls, thus extending maintenance results. The Meridian diffusion furnace
reliably by gentle separation of the wafers cycles due to debris and accumulation. series includes temperature trim controls
Typical cylindrical magnetrons provide to maintain and adjust for temperature
target utilisation in the 70% range. gradients across the width of the belt.
Temperature uniformity across the belt is
Angstrom Sciences’ cylindrical within +/- 2°C.
magnetron design provides 85% or
greater target utilization. While achieving This tight temperature uniformity is
the highest target utilisation, there are required to achieve uniform sheet
no special design requirements for the resistance values. Tight atmosphere
target itself such as “dog-bones”. The control is required to create a clean
target is a straight standard cylinder of continuous flow of atmosphere. This is
material. accomplished by injecting fresh process
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