Oxford Instruments
Etch, Deposition and Growth
For precise, controllable and
repeatable etching, deposition and
growth of micro and nano structures
Plasma Etch & Deposition
Atomic Layer Deposition
Ion Beam Etch & Deposition
Nanoscale Growth Systems
Hydride Vapour Phase Epitaxy
For more information email:
plasma.technology@oxinst.com
Oxford Instruments Plasma Technology Tel: +44 (0)1934 837000
www.oxford-instruments.com/semi The Business of Science
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