Semiconductor sealing one-stop-shop
Semiconductor
Aiming to maximize
manufacturing
semiconductor equipment Variseal®
processes are
performance Variseal® spring energized PTFE based
At Trelleborg Sealing Solutions, we know that Turcon® seals have been used in the most
extremely
designers of semiconductor equipment want to demanding of semiconductor sealing
aggressive. Seals
maximize the performance of the machines they applications including vacuum and corrosive
manufacture. Selecting the optimum seal environments. They are field proven to give
are often housed
material and type can help ensure that. Using high sealing integrity in extreme gas and
in areas of the
the right seal increases service life and extends liquid handling situations.
meantime between planned maintenance
processing system
(MTBM). This will reduce downtime, maximize
where they must
production efficiency, yields and process
reliability, meaning overall, total cost of Wills Rings®
withstand highly
ownership is minimized for the customer. The original metal seals, Wills Rings®
destructive
provide the optimum solution in static sealing
The experience and range to on connectors, flanges and plates for gases
liquids, gases and
offer the right seal for the job and liquids under extreme conditions. They
plasmas, at
Trelleborg Sealing Solutions has lots of operate in temperatures from cryogenic up to
experience in providing sealing solutions to +850°C and in pressures from hard vacuum
elevated
semiconductor equipment manufacturers. This and up to 1000 MPa.
temperatures or in
allows us to recommend the best possible option
from our extensive range of innovative seal Isolast® Fab Range™
vacuum
materials and products. Many of these are High performance perfluoroelastomers
conditions. To
specifically engineered to meet the increasingly specially designed for semiconductor use, they
demanding requirements of the semiconductor are virtually inert and have almost universal
ensure long
industry, giving exceptional sealing integrity. chemical compatibility. With a continuous
service life,
We are a one-stop-shop for the majority of operating temperature up to +320°C, they are
sealing needs, even the most difficult within this ideal for upstream solutions such as wet
equipment
critical manufacturing process. processing systems and in plasma.
designers must
Elastomers
have available the
Fluoroelastomer (FKM) seals are ideal for
right seals to
downstream applications such as vacuum
pumps and in wet processing where
stand up to the
temperatures do not exceed +220°C. They
job. Trelleborg
give excellent resistance to many
semiconductor chemicals, while offering high
Sealing Solutions
purity, low permeation and outgassing levels.
provides one of
Engineered thermoplastics
the broadest
A variety of sealing options are available in
ranges of products
engineered thermoplastics ranging from novel
solutions in PEEK™ to HiMod® wear rings
and materials
Seals and materials and bearings.
specifically
recommended for
semiconductor applications: The range of Trelleborg
engineered for this
O-Rings Sealing Solutions products for
sector.
Trelleborg Sealing Solutions offers a wide the Semiconductor industry
range of O-Rings that balance cost- offers:
effectiveness with performance. Any size of O- ●Temperature resistance from cryogenic up to
Ring is available (standard or custom), in +850°C
materials ranging from basic elastomer grades ●Resistance to dry and wet process chemistry
to leading edge compounds specifically developed ●Excellent stability – thermal, within a
for the industry. vacuum or under pressure
●Extremely low levels of ionic impurities and
Varilip® PDR TOCs (Total Organic Carbon)
These seals consist of a PTFE based Turcon® ●Minimal particle generation and outgassing,
sealing lip retained in a crimped or clamped even at high temperatures
metal case. They are ideal for use in process ●Low permeation rates
pumps where they prevent gearbox oil from ●Reduced IR absorption and weight loss
entering the processing system and allow the ●Good mechanical performance
introduction of an inert gas barrier. ●Low long-term compression set
Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44