Case Study
Sealed with
a kiss
Industry tests conducted
Issue I 2009
square4
at IMEC demonstrate the
.com
potential benefits of
perfluoroelastomer parts
in critical seal locations.
Dr. Michele Vigliotti from
oasiasemiconductor
DuPont discusses the .eur
performance results. www
15
R
ecent test results on the deposition) processes due to the need prototypes of wafer fabrication
latest sealing materials for seal replacement during planned equipment for its strategic partners.
designed to optimise maintenance (PM). IMEC replicates typical process
chip manufacturing in Exhaustive testing of sealing conditions in the industry and then
both 200 and 300 mm materials on CVD platforms reveals that pushes materials and equipment further
platforms have important implications potential risks of contamination can be to anticipate future demands as much
for semiconductor fabricators. Dr. reduced and meantime between as 3 to 5 years ahead of production.
Michele Vigliotti, Semiconductor replacement (MTBR) extended by Testing of new sealing materials
Consultant Europe, DuPont careful selection of sealing materials. aimed to shorten maintenance times is
Performance Elastomers discusses the A recent breakthrough in an important part of IMEC’s work. With
performance of the next generation perfluoroelastomer (FFKM) seal several “one of a kind” tools, learning
perfluoroelastomer (FFKM) seal material technology is promising significant cycles are of the utmost importance in
which offers the potential for significant improvements in seal life. This could supporting R&D needs.
improvements in seal life, reduced also lead to subsequent reduction in IMEC’s current PM testing
downtime and replacement costs, and particulate contamination. programmes designed to maintain all its
lower particulate contamination. platforms in the CVD area were
As the semiconductor industry Proving new materials discussed, with Jeroen De Mars, Area
invests in 300 mm wafer fabrication, the Several international research centres in Manager Hardware Support, Stefaan
spotlight is on process improvement nanoelectronics and nanotechnology, Wijnants and Kristof Coose, Hardware
and the greater demands this such as IMEC, the independant research Support Engineers at IMEC’s Silicon
technology is making on process centre based in Leuven, Belgium, are Process & Device Technology Division.
equipment. With the output of 300 mm focusing on the next generation “One of the main drivers for IMEC’s
wafers at least double that of today’s technologies of ICT systems by bridging PM work is time and money saving. So
predominantly 200 mm fabrication, the gap between fundamental research the starting point was cost reduction,
downtime is a critical factor to minimise. at universities, and technology and by reducing cost, we saw we could
Elastomer sealing materials can be a development in industry. make progress in many ways. In PM,
weak link in CVD (chemical vapour A key part of IMEC’s work is to test one of the main costs is O-ring seals. A
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