Customer Feedback
When Cambridge NanoTech made the switch to Swagelok ALD
valves, the company added significant life to its gas delivery
assemblies. The valves are rated for >50 million cycles
recently, customers are demanding a valve that the people who support those products are
can be completely immersed in a high knowledgeable and can really help.”
temperature environment. In some ALD systems,
the entire gas system, including valve actuators, Low-Maintenance Designs
may be placed inside a heated enclosure, which In Cambridge NanoTech’s ALD tool, the ALD
requires high-temperature rated valves tested up valves are part of a subassembly that also
to 220°C (428°F). employs Swagelok VCR end connection fittings,
Swagelok’s attentiveness to these market ball valves or bellows valves, and stainless steel
trends has contributed to the company’s long- tubing links. This subassembly is dependable
standing relationship with Cambridge NanoTech. and low maintenance, and, if necessary, easily
“I think it’d be impossible, really, for us to serviceable.
be doing the work that we’re doing if we didn’t “It is very important for us to make tools
30
have the quality of parts that we have right now that are easy to service,” Becker explains. “We
from Swagelok,” said Ganesh Sundaram, Ph.D., want people to recognize parts, like VCR fittings
www
Vice President of Technology at Cambridge and ball valves, and be able to adjust or replace
.eur NanoTech. “The catalog itself is really a thing of components easily. For example, the Swagelok
oasiasemiconductor
A gas delivery wonder. The work of a research scientist is made cylinders that hold precursor gas take less than
assembly for an ALD much, much easier by the fact that there’s such a two minutes to exchange.”
tool wide selection of products available, and that When Cambridge NanoTech made the
switch to Swagelok ALD valves, the company
added significant life to its gas delivery
assemblies. The valves are rated for >50 million
.com
cycles. Among the valve’s design features that
enable extended life, high performance, and
dependability in ALD applications are the
square4
Issue VI 2009
following:
ring6 High-purity grade PFA seats for a broad
range of chemical compatibility and
excellent resistance to swelling and
contamination;
ring6 Uniquely non-hemispherical shaped
diaphragm made of Elgiloy superalloy
material;
ring6 Temperature tolerance to 200° C; and
ring6 Consistent flow rates from cycle to cycle
and valve to valve.
“With Swagelok’s ALD valves, we are getting
millions of cycles without any problems. In fact,
we have yet to break one,” notes Becker. “The
lifetimes of these valves are phenomenal. We
also appreciate the fact that you can heat them.
It’s the perfect ALD valve.”
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