Customer Feedback
No more leaks
Atomic Layer Deposition (ALD) is growing in acceptance and will become a key tool
as the manufacturing industry seeks to scale devices further. Manufacturing at that
level requires an extraordinary degree of accuracy and any tool operating at this
level must perform within precise parameters. Cambridge NanoTech provide
feedback on ALD tests and performance with valves supplied by Swagelok as
the company sought to improve initial material concerns.
28
W
hen Cambridge NanoTech heat. The result was lots of downtime.
Inc. first started “The first valves we were using needed to
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manufacturing atomic layer deposition (ALD) be replaced once a month,” explains Dr. Jill
.eur systems in 2003, the company was experiencing Becker, founder of Cambridge NanoTech. “That
oasiasemiconductor
frustrating clogs in the system’s valves, which meant operators had to cool the system down,
were also underperforming when exposed to go in there with wrenches, take everything apart,
and replace the valves with ones that were sure
to cause downtime again in the future. When
you think about manufacturing efficiency, you
just can’t have this sort of maintenance
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headache.”
To extend the life of Cambridge NanoTech’s
ALD gas delivery assemblies, Becker turned to
square4
Issue VI 2009
local Swagelok Company distributor Cambridge
Valve & Fitting. There, she found the answer to
her company’s valve failure issues – the
Swagelok® ALD valve, which provides a highly
improved cycle life and better temperature
compatibility. These valves and other Swagelok
components enabled Cambridge NanoTech and
its customers to dramatically reduce the overall
cost of ownership for ALD processing.
Conserving Precursors
Cambridge NanoTech’s ALD systems are used in
ALD technician research and development and manufacturing
preparing a n ALD operations around the world for semiconductor
tool for operation wafers, nanoelectronics, optics, and
microelectromechanical systems (MEMS), in
addition to novelty applications such as coatings
for drill bits, router bits, and even butterfly
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