Oxford Instruments
Etch, Deposition and Growth
For precise, controllable and
repeatable etching, deposition and
growth of micro and nano structures
Plasma Etch & Deposition
Atomic Layer Deposition
Ion Beam Etch & Deposition
Nanoscale Growth Systems
Hydride Vapour Phase Epitaxy
For more information email: plasma.technology@oxinst.com
Oxford Instruments Plasma Technology Tel: +44 (0)1934 837000
www.oxford-instruments.com/compsemi The Business of Science
®
9001:2008
a73 Comprehensive line of solid and hollow shaft
rotary motion feedthroughs
a73 Does your powder-producing process cause
EXPENSIVE DOWNTIME?
a73 High speed, high torque devices for process
and R&D applications
a73 Protect your process environment from back-streaming
powder in the event of dry pump failure
a73 Low vapor pressure fluid seal ensures long
service life
a73 Fast pneumatic actuation – closes in <0.3 seconds
a73 Long cycle life under adverse process conditions
09-133
Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44