Industry News
ASML and Brion
STMicroelectronics, at Crolles, France.
“Furthermore this ST-ASML effort is a
reinforcement of the Crolles
extend STMicro
cooperative R&D cluster, which gathers
partners around the development and
enabling of low-power SoC (System on
partnership
Chip) and value-added application-
specific technologies. This is a perfect
example of a project developed within
the framework of the Nano2012
ASML, along with its subsidiary Brion sources, including the recently program.”
Technologies have announced a broad- announced FlexRay programmable “As a long-time customer of ASML,
scoped joint development project with illuminator. Together Tachyon SMO and ST is an excellent partner with whom to
STMicroelectronics (ST) to accelerate FlexRay will provide ST faster explore and develop holistic lithography
28-nm node deployment and 22-nm development cycles in R&D and faster methods for creating advanced
node development. This joint ramp to production. Till now, ST has semiconductors,” said Bert Koek, senior
development project, code-named successfully used Brion’s Tachyon OPC+ vice president, applications product
Issue VIII 2009
SOLID (Silicon printing Optimization optical proximity correction and LMC group at ASML.
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with Lithography control and Integrated lithography manufacturability check in Nano2012 is a strategic R&D
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Design), seeks to optimize the its 45-nm production. program, led by ST, which gathers
patterning process from design to “This joint development project research institutes and industrial partners
manufacturing, extend characterization combined with ASML’s integrated suite and is supported by French national,
tools and methods to develop new of lithography products, including Brion regional and local authorities. The
correction/compensation techniques for computational solutions and the latest program aims to create one of the
reducing variability and explore generation of TWINSCAN NXT scanner world’s most advanced R&D clusters for
breakthrough lithography solutions for provides ST with computational and the development of new generations of
oasiasemiconductor
manufacturing complex chips at sub-30- wafer lithography technologies that will semiconductor technology platforms at
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nm nodes. enable us to develop optimum the nano-electronic level, where the
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ST will work with Tachyon SMO manufacturing solutions at 28-nm and dimensions of the structures used to
source-mask co-optimization in tandem below,” said Joël Hartmann, Silicon build the silicon chips are in the order of
11
with ASML’s advanced illumination Technology Development Director for tens of nanometres (billionths of a meter).
Pfeiffer Vacuum acquires vacuum
component manufacturer
PFEIFFER VACUUM TECHNOLOGY AG engineering new technologies is also
announces the signing of a contract to complementary. All regions and market
acquire Trinos Vakuum-Systeme GmbH segments will benefit from this
of Göttingen, Germany. Under the acquisition, in particular the North
terms of the agreement, Pfeiffer America region and the analytical,
Vacuum will acquire 100 percent of the coating and research & development network will be swift, and we intend to
shares in the Trinos company, coming segments of the company. work together to generate further
effective January 1, 2010. Pfeiffer Vacuum Chief Executive growth.”
The purchase price will be financed Officer Manfred Bender explains: “Of Trinos Vakuum-Systeme GmbH was
in cash. Confidentiality has been agreed all of the potential acquisitions that we formed in 1997 by Peter Spreitz and
regarding the total volume of the have recently reviewed, Trinos Vakuum- Marcus Weinhagen. The company
transaction. Systeme makes for the best fit with us. employs a workforce of around 140
By expanding the Pfeiffer Vacuum The company is young, fast growing, people. Sales revenues in fiscal 2008
portfolio to include the high-quality profitable and active in the same totaled some €18 million. In September
vacuum components, chambers and markets we are. 2009, Trinos was awarded the SME
systems from Trinos Vakuum-Systeme, Trinos has a very good name in the Grand Prix from the Oskar Patzelt
the company can now offer its marketplace. With this move, Pfeiffer Foundation. Pfeiffer Vacuum plans to
customers throughout the world even Vacuum is taking a further step along retain and expand the location in
more comprehensive solutions for their the road to becoming a full-line Göttingen, along with all of its
vacuum needs. provider of vacuum applications. We are employees. The two former owners will
The expertise possessed by the convinced that Trinos’ integration into remain with the company as managing
two companies in developing and our worldwide sales and service directors.
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