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IC Industry Awards 2009
Wafer Processing: Subsystems &
FEOL Award Components
Enhancement Award
Applied Materials, Inc.
BLOk II PECVD system Advanced Energy Industries,
Inc.
Intevac The Paramount RF Power-
Lean Etch platform Delivery System
Lam Research ATMI
2300 MOTIF AutoClean Technology
March Plasma Systems CyberOptics Semiconductor
FlexTRAK-WR Plasma Etching Auto Gapping Sensor
System
Cymer
Nikon Corporation Gas Lifetime eXtension (GLX)
Issue V 2009
NSR-S310F
square4
Entegris, Inc
.com
Novellus Systems Torrento Filters
VECTOR Extreme
Levitronix
IC Industry
Tokyo Electron Limited BPS 600
CELLESTA +
Awards
Nexen
ULVAC Technologies The Roller Pinion System
oasiasemiconductor
Enviro ‘Optima’ Resist Strip (RPS)
2009
.eur
System
www
Subsystems & FAB Management
15
Components Award Award Award
Recognising
Aerotech, Inc Aquest Systems
PlanarHD Air-Bearing Stage FabEX Innovation
Edwards Asyst
The Ixh vacuum pump Factory Data Integration
Rewarding
GF Piping FEI Company
Type 567 Butterfly Valve Remote Access Program Motivation
Hach Ultra Maser Engineering
MET ONE 6000 Series Outsourcing Service
InnerSense Numetrics Management
The Smart Wafer Systems
NMX- ERP 3.0
NEHP www.euroasia
Family of modules QWiKS
PPM System semiconductor.com/
Rohm & Haas
VisionPad 5000 cmp PAD
awards_vote.php
TresArk, Inc.
TreLytics
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